Characterization of CNx films prepared by twinned ECR plasma source enhanced DC magnetron sputtering
2001 ◽
Vol 390
(1-2)
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pp. 107-112
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Keyword(s):
2018 ◽
Vol 5
(1)
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pp. 2696-2704
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Keyword(s):
2007 ◽
Vol 40
(3)
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pp. 107-112
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2009 ◽
Vol 54
(3)
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pp. 1297-1301
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2003 ◽
Vol 433-436
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pp. 987-990
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2020 ◽
Vol 381
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pp. 125095
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1996 ◽
Vol 31
(23)
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pp. 6137-6144
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2001 ◽
Vol 188
(3)
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pp. 1047-1058
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2012 ◽
Vol 31
(6)
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pp. 591-591
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