Optical investigations of mixed-phase boron nitride thin films by infrared spectroscopic ellipsometry

1998 ◽  
Vol 313-314 ◽  
pp. 692-696 ◽  
Author(s):  
M. Schubert ◽  
E. Franke ◽  
H. Neumann ◽  
T.E. Tiwald ◽  
D.W. Thompson ◽  
...  
Keyword(s):  
Thin Films ◽  
Boron Nitride ◽  
Spectroscopic Ellipsometry ◽  
Mixed Phase ◽  
Infrared Spectroscopic

scholarly journals Infrared optical properties of mixed-phase thin films studied by spectroscopic ellipsometry using boron nitride as an example

1997 ◽  
Vol 56 (20) ◽  
pp. 13306-13313 ◽  
Author(s):  
M. Schubert ◽  
B. Rheinländer ◽  
E. Franke ◽  
H. Neumann ◽  
T. E. Tiwald ◽  
...  
Keyword(s):  
Thin Films ◽  
Optical Properties ◽  
Boron Nitride ◽  
Spectroscopic Ellipsometry ◽  
Mixed Phase ◽  
Infrared Optical Properties

Microcrystalline Cubic Boron Nitride/Amorphous Hydrogenated Boron Nitride Mixed Phase Thin Films

1994 ◽  
Vol 358 ◽  
Author(s):  
Shu-Han Lin ◽  
Bernard J. Feldman
Keyword(s):  
Electron Microscopy ◽  
Thin Films ◽  
Boron Nitride ◽  
Hexagonal Boron Nitride ◽  
Cubic Boron Nitride ◽  
Mixed Phase ◽  
Good Adhesion ◽  
Transmission Electron ◽  
Plasma Decomposition ◽  
Absorption Measurements

ABSTRACTTransparent and insulating thin films have been grown by the plasma decomposition of B2H6, NH3, and H2, at a substrate temperature of 250°C. From chemical composition, transmission electron microscopy, infrared absorption, and optical absorption measurements, the thin films are determined to be a mixed phase of crystalline cubic boron nitride and amorphous hydrogenated boron nitride. Also, the films have significantly more boron than nitrogen, a large concentration of hydrogen, a very large bandgap, strong infrared aborption due to both hexagonal boron nitride and boron icosahedra, and good adhesion to various substrates.

scholarly journals Phase and microstructure investigations of boron nitride thin films by spectroscopic ellipsometry in the visible and infrared spectral range

1997 ◽  
Vol 82 (6) ◽  
pp. 2906-2911 ◽  
Author(s):  
Eva Franke ◽  
Mathias Schubert ◽  
Horst Neumann ◽  
Thomas E. Tiwald ◽  
Daniel W. Thompson ◽  
...  
Keyword(s):  
Thin Films ◽  
Boron Nitride ◽  
Spectral Range ◽  
Spectroscopic Ellipsometry ◽  
Infrared Spectral Range ◽  
Infrared Spectral

Infrared spectroscopic ellipsometry of (Pb, La)(Zr, Ti)O3 thin films on platinized silicon

2004 ◽  
Vol 320 (5-6) ◽  
pp. 478-486 ◽  
Author(s):  
Z.G. Hu ◽  
F.W. Shi ◽  
T. Lin ◽  
Z.M. Huang ◽  
G.S. Wang ◽  
...  
Keyword(s):  
Thin Films ◽  
Spectroscopic Ellipsometry ◽  
Infrared Spectroscopic
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