The Use of Infrared Spectroscopic Ellipsometry for the Thickness Determination and Molecular Characterization of Thin Films on Aluminum

2001 ◽  
Vol 148 (2) ◽  
pp. F12 ◽  
Author(s):  
T. Schram ◽  
H. Terryn
Keyword(s):  
Thin Films ◽  
Molecular Characterization ◽  
Spectroscopic Ellipsometry ◽  
Thickness Determination ◽  
Infrared Spectroscopic

Optical characterization of CuIn1−xGaxSe2 alloy thin films by spectroscopic ellipsometry

2003 ◽  
Vol 94 (2) ◽  
pp. 879-888 ◽  
Author(s):  
P. D. Paulson ◽  
R. W. Birkmire ◽  
W. N. Shafarman
Keyword(s):  
Thin Films ◽  
Spectroscopic Ellipsometry ◽  
Optical Characterization

Characterization of SiN thin films with spectroscopic ellipsometry

1993 ◽  
Vol 185 (1-4) ◽  
pp. 342-347 ◽  
Author(s):  
J. Petalas ◽  
S. Logothetidis ◽  
A. Markwitz ◽  
E.C. Paloura ◽  
R.L. Johnson ◽  
...  
Keyword(s):  
Thin Films ◽  
Spectroscopic Ellipsometry

Spectroscopic ellipsometry characterization of Er3+-dopedtitania thin films prepared by the sol-gel method

Optik ◽  
2001 ◽  
Vol 112 (7) ◽  
pp. 316-320 ◽  
Author(s):  
R. Palomino-Merino ◽  
A. Mendoza-Galván ◽  
G. Martínez ◽  
V. Castaño ◽  
R. Rodríguez
Keyword(s):  
Thin Films ◽  
Spectroscopic Ellipsometry ◽  
Sol Gel ◽  
Gel Method ◽  
Sol Gel Method

Combined characterization of conductive materials by infrared spectroscopic ellipsometry and grazing X-ray reflectance

1998 ◽  
Vol 319 (1-2) ◽  
pp. 67-72 ◽  
Author(s):  
Pierre Boher ◽  
Michel Luttmann ◽  
Jean Louis Stehle ◽  
Louis Hennet
Keyword(s):  
Spectroscopic Ellipsometry ◽  
X Ray ◽  
Conductive Materials ◽  
Infrared Spectroscopic
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