The physical properties of Al-doped zinc oxide films prepared by RF magnetron sputtering [Thin Solid Films, 305 (1997) 201–209]

1998 ◽  
Vol 320 (2) ◽  
pp. 329 ◽  
Author(s):  
Ki Cheol Park ◽  
Dae Young Ma ◽  
Kun Ho Kim
Keyword(s):  
Zinc Oxide ◽  
Magnetron Sputtering ◽  
Physical Properties ◽  
Oxide Films ◽  
Rf Magnetron Sputtering ◽  
Thin Solid Films ◽  
Solid Films ◽  
Zinc Oxide Films

Influence of Thermal Annealing on Microstructures of Zinc Oxide Films Deposited by RF Magnetron Sputtering

2007 ◽  
Vol 46 (6A) ◽  
pp. 3319-3323 ◽  
Author(s):  
Takahiro Hiramatsu ◽  
Mamoru Furuta ◽  
Hiroshi Furuta ◽  
Tokiyoshi Matsuda ◽  
Takashi Hirao
Keyword(s):  
Zinc Oxide ◽  
Magnetron Sputtering ◽  
Thermal Annealing ◽  
Oxide Films ◽  
Rf Magnetron Sputtering ◽  
Zinc Oxide Films

Structural studies of zinc oxide films grown by RF magnetron sputtering

2005 ◽  
Vol 148 (1) ◽  
pp. 37-41 ◽  
Author(s):  
I. Sayago ◽  
M. Aleixandre ◽  
A. Martínez ◽  
M.J. Fernández ◽  
J.P. Santos ◽  
...  
Keyword(s):  
Zinc Oxide ◽  
Magnetron Sputtering ◽  
Oxide Films ◽  
Rf Magnetron Sputtering ◽  
Structural Studies ◽  
Zinc Oxide Films

Tailoring the properties of zinc oxide films by incorporating gold nanoparticles using RF magnetron sputtering

2018 ◽  
Vol 124 (12) ◽  
Author(s):  
R. Sreeja Sreedharan ◽  
V. S. Kavitha ◽  
S. Suresh ◽  
R. Reshmi Krishnan ◽  
R. Jolly Bose ◽  
...  
Keyword(s):  
Gold Nanoparticles ◽  
Zinc Oxide ◽  
Magnetron Sputtering ◽  
Oxide Films ◽  
Rf Magnetron Sputtering ◽  
Zinc Oxide Films

Effect of Energetic Particle Bombardment on Microstructure of Zinc Oxide Films Deposited by RF Magnetron Sputtering

2007 ◽  
Vol 46 (7A) ◽  
pp. 4038-4041 ◽  
Author(s):  
Mamoru Furuta ◽  
Takahiro Hiramatsu ◽  
Tokiyoshi Matsuda ◽  
Hiroshi Furuta ◽  
Takashi Hirao
Keyword(s):  
Zinc Oxide ◽  
Magnetron Sputtering ◽  
Particle Bombardment ◽  
Energetic Particle ◽  
Oxide Films ◽  
Rf Magnetron Sputtering ◽  
Zinc Oxide Films
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