Simple method for the determination of optical parameters of inhomogeneous thin films

A simple method for determination of optical constants and thickness of semitransparent thin films deposited onto a transparent finite substrate has been developed. The method is based on the analysis of successive interference fringes of transmission spectra created by the films. It is essentially not necessary to obtain the envelope of transmission spectra in this method. The determined values of optical parameters are in good agreement with their true values used to generate transmission data. The accuracy of method in determining refractive index and thickness of the films is better than 1%.

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Determination of optical parameters of organic and inorganic thin films using both surface plasmon resonance and Abelès-Brewster methods

Optik ◽

10.1016/j.ijleo.2017.05.090 ◽

2017 ◽

Vol 142 ◽

pp. 426-435 ◽

Cited By ~ 2

Author(s):

Y.M. Espinosa-Sánchez ◽

D. Luna-Moreno ◽

M. Rodríguez-Delgado ◽

A. Sánchez-Álvarez

Keyword(s):

Thin Films ◽

Surface Plasmon Resonance ◽

Surface Plasmon ◽

Plasmon Resonance ◽

Optical Parameters ◽

Inorganic Thin Films

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Application of spectrophotometry and ellipsometry for determination of optical parameters of optical coating thin films

2010 International Students and Young Scientists Workshop "Photonics and Microsystems" ◽

10.1109/stysw.2010.5714158 ◽

2010 ◽

Author(s):

J Domaradzki ◽

S Lis ◽

D Kaczmarek ◽

S Patela

Keyword(s):

Thin Films ◽

Optical Parameters ◽

Optical Coating

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Determination of optical parameters and thickness of weakly absorbing thin films from reflectance and transmittance spectra

Applied Optics ◽

10.1364/ao.45.004547 ◽

2006 ◽

Vol 45 (19) ◽

pp. 4547 ◽

Cited By ~ 8

Author(s):

Vitaly P. Kutavichus ◽

Valery V. Filippov ◽

Vitali H. Huzouski

Keyword(s):

Thin Films ◽

Optical Parameters ◽

Transmittance Spectra

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Determination of Thickness and Optical Parameters of Thin Films from Reflectivity Spectra Using Teaching-Learning Based Optimization Algorithm

Journal of Nano- and Electronic Physics ◽

10.21272/jnep.12(2).02015 ◽

2020 ◽

Vol 12 (2) ◽

pp. 02015-1-02015-6

Author(s):

Sanjay J. Patel ◽

◽

Akshay Jariwala ◽

C. J. Panchal ◽

Vipul Kheraj ◽

...

Keyword(s):

Thin Films ◽

Optimization Algorithm ◽

Optical Parameters ◽

Reflectivity Spectra ◽

Teaching Learning Based Optimization ◽

Teaching Learning

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A Simple Method for Determination of Thermal Conductivity Coefficients of Thin Films

10.1115/imece2001/mems-23917 ◽

2001 ◽

Author(s):

Chi Hsiang Pan ◽

Chien Li Tung

Keyword(s):

Thin Films ◽

Thermal Conductivity ◽

Thermal Conductivity Coefficient ◽

Crystalline Silicon ◽

Silicon Film ◽

Simple Method ◽

Active Devices ◽

Analytical Expressions

Abstract In this paper, we present a simple method to determine thermal conductivity coefficients (TCC) of thin films with a compact characterization microstructure and by using common measuring apparatus. The microstructure can be fabricated by a simple surface micromachining technique and in situ along with active devices on the same chip. Analytical expressions are derived to calculate the thermal conductivity coefficients of thin films from the experimental data. Experimental results with a heavily n-doped LPCVD poly crystalline silicon film are used herein to demonstrate the effectiveness of the proposed method. The obtained thermal conductivity coefficient seems to decrease a little as temperature increase and the average is around 39 Wm−1 °C−1 at 400°C below.

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