Effects of oxygen gettering and target mode change in the formation process of reactively RF sputtered WOx thin films

Vacuum ◽  
2002 ◽  
Vol 66 (3-4) ◽  
pp. 269-273 ◽  
Author(s):  
A Yamamoto ◽  
Y Abe ◽  
M Kawamura ◽  
K Sasaki
Keyword(s):  
Thin Films ◽  
Formation Process ◽  
Mode Change ◽  
Target Mode

Phase formation process of IrxSi1−x thin films Structure and electrical properties

1997 ◽  
Vol 310 (1-2) ◽  
pp. 8-18 ◽  
Author(s):  
R. Kurt ◽  
W. Pitschke ◽  
A. Heinrich ◽  
J. Schumann ◽  
J. Thomas ◽  
...  
Keyword(s):  
Thin Films ◽  
Electrical Properties ◽  
Phase Formation ◽  
Formation Process ◽  
Phase Formation Process

Formation process of MnBi thin films

1972 ◽  
Vol 8 (3) ◽  
pp. 487-489 ◽  
Author(s):  
Y. Iwama ◽  
U. Mizutani ◽  
F. Humphrey
Keyword(s):  
Thin Films ◽  
Formation Process

Visualizing Atomistic Formation Process of SrOx Thin Films on SrTiO3

ACS Nano ◽  
2014 ◽  
Vol 8 (3) ◽  
pp. 2223-2229 ◽  
Author(s):  
Takeo Ohsawa ◽  
Ryota Shimizu ◽  
Katsuya Iwaya ◽  
Taro Hitosugi
Keyword(s):  
Thin Films ◽  
Formation Process

Formation process of MnBi thin films by Williams' method

1983 ◽  
Vol 76 (1) ◽  
pp. 75-83 ◽  
Author(s):  
Y. Iwama ◽  
Y. Takeno
Keyword(s):  
Thin Films ◽  
Formation Process
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