Synthesis of ScF3, LaF3 nanolayers and nLaF3-mScF3 multinanolayers at the surface of silicon by successive ionic layer deposition method
1997 ◽
Vol 112
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pp. 255-257
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2011 ◽
Vol 46
(13)
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pp. 4555-4561
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2011 ◽
Vol 128
(3)
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pp. 433-441
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1993 ◽
Vol 62
(3)
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pp. 237-242
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1997 ◽
Vol 101-103
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pp. 165-170
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2015 ◽
Vol 85
(11)
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pp. 2528-2532
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Keyword(s):
2020 ◽
Vol 11
(5)
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pp. 608-614
Keyword(s):
2019 ◽
Vol 270
◽
pp. 156-161
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2017 ◽
Vol 26
(3)
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pp. 336-339
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