Deeply etched two-dimensional photonic crystals fabricated on GaAs/AlGaAs slab waveguides by using chemically assisted ion beam etching

2002 ◽  
Vol 61-62 ◽  
pp. 875-880 ◽  
Author(s):  
K. Avary ◽  
J.P. Reithmaier ◽  
F. Klopf ◽  
T. Happ ◽  
M. Kamp ◽  
...  
Keyword(s):  
Photonic Crystals ◽  
Ion Beam ◽  
Two Dimensional ◽  
Ion Beam Etching ◽  
Slab Waveguides

Feature size effects in chemically assisted ion beam etching of InP-based photonic crystals

2006 ◽  
Author(s):  
A. Berrier ◽  
M. Mulot ◽  
A. Talneau ◽  
R. Ferrini ◽  
R. Houdré ◽  
...  
Keyword(s):  
Photonic Crystals ◽  
Size Effects ◽  
Ion Beam ◽  
Feature Size ◽  
Ion Beam Etching

TWO-DIMENSIONAL ORDERED POROUS STRUCTURES FOR PHOTONIC CRYSTALS OBTAINED USING DEEP ANODIC ETCHING AND FOCUSED ION BEAM TECHNIQUES

2004 ◽  
Vol 03 (01n02) ◽  
pp. 81-85
Author(s):  
E. Yu. GAVRILIN ◽  
Yu. B. GORBATOV ◽  
V. V. STARKOV ◽  
A. F. VYATKIN
Keyword(s):  
Photonic Crystals ◽  
Plasma Etching ◽  
Focused Ion Beam ◽  
Ion Beam ◽  
Visible Region ◽  
Two Dimensional ◽  
Porous Structures ◽  
Ordered Structure ◽  
Anodic Etching ◽  
Ordered Porous

Photonic crystals are the very promising novel materials for micro- and nanophotonics for visible region. To produce photonic crystals for this region of light, artificial structures with characteristic sizes less than 1 μm have to be manufactured. Electrochemical deep anodic etching and plasma etching techniques is normally used to produce such structures in silicon wafers. However, standard way of deep anodic etching realization is not suitable for sub-micrometer porous silicon formation. In the present work combination of the deep anodic etching and focused ion beam techniques is used to produce ordered structure of macropores in silicon.

Focused-ion-beam etching in macroporous silicon to realize three-dimensional photonic crystals

2000 ◽  
Vol 33 (20) ◽  
pp. L119-L123 ◽  
Author(s):  
K Wang ◽  
A Chelnokov ◽  
S Rowson ◽  
P Garoche ◽  
J-M Lourtioz
Keyword(s):  
Photonic Crystals ◽  
Focused Ion Beam ◽  
Ion Beam ◽  
Three Dimensional ◽  
Macroporous Silicon ◽  
Ion Beam Etching

Near-infrared Yablonovite-like photonic crystals by focused-ion-beam etching of macroporous silicon

2000 ◽  
Vol 77 (19) ◽  
pp. 2943-2945 ◽  
Author(s):  
A. Chelnokov ◽  
K. Wang ◽  
S. Rowson ◽  
P. Garoche ◽  
J.-M. Lourtioz
Keyword(s):  
Photonic Crystals ◽  
Focused Ion Beam ◽  
Near Infrared ◽  
Ion Beam ◽  
Macroporous Silicon ◽  
Ion Beam Etching
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