Ion beam assisted deposition of substoichiometric silicon nitride

1987 ◽  
Vol 19-20 ◽  
pp. 983-986 ◽  
Author(s):  
E.P. Donovan ◽  
D.R. Brighton ◽  
G.K. Hubler ◽  
D. van Vechten
Keyword(s):  
Silicon Nitride ◽  
Ion Beam ◽  
Ion Beam Assisted Deposition

Silicon Nitride Layers on Tool Steel Produced by Ion Beam Mixing and Ion Beam Assisted Deposition

1989 ◽  
Vol 112 (2) ◽  
pp. 533-539 ◽  
Author(s):  
E. Hensel ◽  
H. Sommer ◽  
P. Knothe ◽  
E. Richter
Keyword(s):  
Silicon Nitride ◽  
Tool Steel ◽  
Ion Beam ◽  
Ion Beam Mixing ◽  
Ion Beam Assisted Deposition ◽  
Nitride Layers

Plasmonic properties of titanium nitride thin films prepared by ion beam assisted deposition

2016 ◽  
Vol 185 ◽  
pp. 295-298 ◽  
Author(s):  
Lin-Ao Zhang ◽  
Hao-Nan Liu ◽  
Xiao-Xia Suo ◽  
Shuo Tong ◽  
Ying-Lan Li ◽  
...  
Keyword(s):  
Thin Films ◽  
Titanium Nitride ◽  
Ion Beam ◽  
Ion Beam Assisted Deposition

Fundamental Aspects of Ion Beam Assisted Deposition of Magnesium Oxide Template Films

2009 ◽  
Vol 19 (3) ◽  
pp. 3311-3314 ◽  
Author(s):  
J.R. Groves ◽  
R.F. DePaula ◽  
L. Stan ◽  
R.H. Hammond ◽  
B.M. Clemens
Keyword(s):  
Magnesium Oxide ◽  
Ion Beam ◽  
Ion Beam Assisted Deposition

Optical and electrical properties of p-type zinc oxide thin films synthesized by ion beam assisted deposition

2005 ◽  
Vol 492 (1-2) ◽  
pp. 203-206 ◽  
Author(s):  
Zhi Yan ◽  
Zhi Tang Song ◽  
Wei Li Liu ◽  
Qing Wan ◽  
Fu Min Zhang ◽  
...  
Keyword(s):  
Thin Films ◽  
Zinc Oxide ◽  
Electrical Properties ◽  
Ion Beam ◽  
Optical And Electrical Properties ◽  
Oxide Thin Films ◽  
Ion Beam Assisted Deposition ◽  
P Type

Ion-beam assisted deposition of coating interlayers for the joining of Be/CuCrZr

2010 ◽  
Vol 85 (7-9) ◽  
pp. 1689-1692 ◽  
Author(s):  
Yang-Il Jung ◽  
Jung-Suk Lee ◽  
Jeong-Yong Park ◽  
Byoung-Kwon Choi ◽  
Yong-Hwan Jeong ◽  
...  
Keyword(s):  
Ion Beam ◽  
Ion Beam Assisted Deposition
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