Optical and electrical properties of p-type zinc oxide thin films synthesized by ion beam assisted deposition

2005 ◽  
Vol 492 (1-2) ◽  
pp. 203-206 ◽  
Author(s):  
Zhi Yan ◽  
Zhi Tang Song ◽  
Wei Li Liu ◽  
Qing Wan ◽  
Fu Min Zhang ◽  
...  
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Dilip Kumar Mishra ◽  
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Zhinong Yu ◽  
Yuqiong Li ◽  
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Xiaoyi Liao ◽  
...  

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Vol 79-82 ◽  
pp. 787-790
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Feng Ji ◽  
Jin Ma ◽  
Zhen Guo Song ◽  
Xu An Pei ◽  
...  

Copper-tin-oxide thin films have been prepared on quartz substrates by the magnetron sputtering method. The structural,optical and electrical properties were investigated. The prepared samples were amorphous, CuSnO3 single crystalline grains with perovskite structure were observed after annealing temperature was above 530°C. The optical and electrical properties had great dependence with reactive gas pressure and annealing temperature. Thermal probe reveals p type conductivity of some samples. Keywords: Magnetron sputtering, CuSnO3, Perovskite structure


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