A new method to characterize dopant profiles in NMOSFETs using conventional transmission electron microscopy
1986 ◽
Vol 108
(25)
◽
pp. 7957-7963
◽
1985 ◽
Vol 107
(23)
◽
pp. 6714-6715
◽
1992 ◽
Vol 121
(1-2)
◽
pp. 111-120
◽