Gas phase and surface kinetic schemes for metal organic chemical vapor deposition processes: a theoretical perspective

Gas Phase ◽

Vapor Deposition ◽

Theoretical Perspective ◽

Chemical Vapor ◽

Organic Chemical ◽

Kinetic Schemes ◽

Metal Organic ◽

Deposition Processes ◽

A study on the real-time decomposition monitoring of a metal organic precursor for metal organic chemical vapor deposition processes

Measurement Science and Technology ◽

10.1088/0957-0233/20/2/025701 ◽

2008 ◽

Vol 20 (2) ◽

pp. 025701 ◽

Cited By ~ 3

Author(s):

Ju-Young Yun ◽

Soo-Won Heo ◽

Sang-Woo Kang ◽

Jeong-Gil Na ◽

Young-Jae Park ◽

...

Keyword(s):

Real Time ◽

Vapor Deposition ◽

Chemical Vapor ◽

Organic Chemical ◽

Organic Precursor ◽

Metal Organic ◽

Time Decomposition ◽

Deposition Processes ◽

Simulation and Suppression of the Gas Phase Pre-reaction in Metal-Organic Chemical Vapor Deposition of ZnO

Chinese Physics Letters ◽

10.1088/0256-307x/28/11/116803 ◽

2011 ◽

Vol 28 (11) ◽

pp. 116803 ◽

Cited By ~ 2

Author(s):

Guang-Yao Zhu ◽

Shu-Lin Gu ◽

Shun-Ming Zhu ◽

Kun Tang ◽

Jian-Dong Ye ◽

...

Keyword(s):

Gas Phase ◽

Vapor Deposition ◽

Chemical Vapor ◽

Organic Chemical ◽

Metal Organic ◽

Gas-phase chemistry in up-scaled plasma enhanced metal-organic chemical-vapor deposition of TiN and Ti(C, N) on tool steel

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.582456 ◽

2000 ◽

Vol 18 (4) ◽

pp. 1971-1976 ◽

Cited By ~ 5

Author(s):

J. P. A. M. Driessen ◽

A. D. Kuypers ◽

J. Schoonman

Keyword(s):

Gas Phase ◽

Tool Steel ◽

Vapor Deposition ◽

Chemical Vapor ◽

Organic Chemical ◽

Gas Phase Chemistry ◽

Metal Organic ◽

Phase Chemistry ◽

DFT Study on the Gas-Phase Potential Energy Surface Crossing Mechanism of ZnO Formation from Diethylzinc and Triplet Oxygen during Metal-Organic Chemical Vapor Deposition

ChemistrySelect ◽

10.1002/slct.201702448 ◽

2018 ◽

Vol 3 (7) ◽

pp. 1961-1966

Author(s):

Hanlin Gan ◽

Chaoyang Wang ◽

Jian Li ◽

Feng Long Gu

Keyword(s):

Potential Energy ◽

Potential Energy Surface ◽

Gas Phase ◽

Vapor Deposition ◽

Energy Surface ◽

Chemical Vapor ◽

Organic Chemical ◽

Metal Organic ◽

Observations of gas-phase nanoparticles during InGaN metal-organic chemical vapor deposition

Applied Physics Letters ◽

10.1063/1.3009291 ◽

2008 ◽

Vol 93 (17) ◽

pp. 171906 ◽

Cited By ~ 18

Author(s):

J. Randall Creighton ◽

Michael E. Coltrin ◽

Jeffrey J. Figiel

Keyword(s):

Gas Phase ◽

Vapor Deposition ◽

Chemical Vapor ◽

Organic Chemical ◽

Metal Organic ◽

Gas-phase parasitic reactions and Al incorporation efficiency in light radiation heating, low-pressure metal–organic chemical vapor deposition of AlGaN

Materials Letters ◽

10.1016/s0167-577x(00)00128-2 ◽

2000 ◽

Vol 45 (6) ◽

pp. 331-335 ◽

Cited By ~ 5

Author(s):

Y.G Zhou ◽

R Zhang ◽

W.P Li ◽

B Shen ◽

P Chen ◽

...

Keyword(s):

Gas Phase ◽

Vapor Deposition ◽

Chemical Vapor ◽

Organic Chemical ◽

Light Radiation ◽

Radiation Heating ◽

Metal Organic ◽

Organic Chemical Vapor Deposition ◽

Incorporation Efficiency

NUMERICAL VISUALIZATION OF THERMAL FLOW STRUCTURE AND CONCENTRATION CONTOURS IN METAL ORGANIC CHEMICAL VAPOR DEPOSITION REACTORS

Journal of Flow Visualization and Image Processing ◽

10.1615/jflowvisimageproc.v7.i1.20 ◽

2000 ◽

Vol 7 (1) ◽

pp. 12

Author(s):

R. Y. Tzong ◽

C. Y. Soong

Keyword(s):

Flow Structure ◽

Vapor Deposition ◽

Chemical Vapor ◽

Organic Chemical ◽

Thermal Flow ◽

Numerical Visualization ◽

Metal Organic ◽

Laser‐Assisted Metal–Organic Chemical Vapor Deposition of Gallium Nitride

physica status solidi (RRL) - Rapid Research Letters ◽

10.1002/pssr.202170024 ◽

2021 ◽

Vol 15 (6) ◽

pp. 2170024

Author(s):

Yuxuan Zhang ◽

Zhaoying Chen ◽

Kaitian Zhang ◽

Zixuan Feng ◽

Hongping Zhao

Keyword(s):

Gallium Nitride ◽

Vapor Deposition ◽

Chemical Vapor ◽

Organic Chemical ◽

Metal Organic ◽

Growth-Etch Metal–Organic Chemical Vapor Deposition Approach of WS2 Atomic Layers

ACS Nano ◽

10.1021/acsnano.0c05394 ◽

2020 ◽

Author(s):

Assael Cohen ◽

Avinash Patsha ◽

Pranab K. Mohapatra ◽

Miri Kazes ◽

Kamalakannan Ranganathan ◽

...

Keyword(s):

Vapor Deposition ◽

Chemical Vapor ◽

Organic Chemical ◽

Metal Organic ◽

Vertical β-Ga2O3 field plate Schottky barrier diode from metal-organic chemical vapor deposition

Applied Physics Letters ◽

10.1063/5.0047821 ◽

2021 ◽

Vol 118 (16) ◽

pp. 162109

Author(s):

Esmat Farzana ◽

Fikadu Alema ◽

Wan Ying Ho ◽

Akhil Mauze ◽

Takeki Itoh ◽

...

Keyword(s):

Schottky Barrier ◽

Vapor Deposition ◽

Chemical Vapor ◽

Schottky Barrier Diode ◽

Organic Chemical ◽

Field Plate ◽

Metal Organic ◽