Diagnostic of a pulsed CH4–H2 plasma to improve microwave plasma assisted chemical vapour deposition process for diamond synthesis

2001 ◽  
Vol 146-147 ◽  
pp. 586-592 ◽  
Author(s):  
L De Poucques ◽  
G Henrion ◽  
J Bougdira ◽  
R Hugon
Keyword(s):  
Chemical Vapour Deposition ◽  
Vapour Deposition ◽  
Microwave Plasma ◽  
Chemical Vapour ◽  
Deposition Process ◽  
Diamond Synthesis ◽  
Chemical Vapour Deposition Process

Mass spectrometric investigation of the roles of several chemical intermediates in diamond synthesis

RSC Advances ◽  
2015 ◽  
Vol 5 (7) ◽  
pp. 4822-4830 ◽  
Author(s):  
L. S. Fan ◽  
Y. S. Zhou ◽  
M. X. Wang ◽  
Y. Gao ◽  
W. Xiong ◽  
...  
Keyword(s):  
Chemical Vapour Deposition ◽  
Vapour Deposition ◽  
Chemical Vapour ◽  
Deposition Process ◽  
Mass Spectrometric ◽  
Diamond Synthesis ◽  
Spectrometric Investigation ◽  
Mass Spectrometric Investigation ◽  
Combustion Flame ◽  
Chemical Vapour Deposition Process

Mass spectrometric studies were performed to investigate several key chemical intermediates and identify their roles in diamond synthesis in a C2H4/C2H2/O2 combustion-flame chemical vapour deposition process.

A chemical vapour deposition process for the production of carbon nanospheres

Carbon ◽  
2001 ◽  
Vol 39 (4) ◽  
pp. 621-626 ◽  
Author(s):  
Ph. Serp ◽  
R. Feurer ◽  
Ph. Kalck ◽  
Y. Kihn ◽  
J.L. Faria ◽  
...  
Keyword(s):  
Chemical Vapour Deposition ◽  
Vapour Deposition ◽  
Chemical Vapour ◽  
Deposition Process ◽  
Carbon Nanospheres ◽  
Chemical Vapour Deposition Process
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