Diamond Thin Films by Microwave Plasma Chemical Vapour Deposition Process

1998 ◽  
Vol 15 (1-2) ◽  
pp. 65-70
Author(s):  
H C Barshilia ◽  
V D Vankar
Keyword(s):  
Thin Films ◽  
Chemical Vapour Deposition ◽  
Vapour Deposition ◽  
Microwave Plasma ◽  
Chemical Vapour ◽  
Deposition Process ◽  
Plasma Chemical ◽  
Chemical Vapour Deposition Process ◽  
Plasma Chemical Vapour Deposition ◽  
Diamond Thin Films

Microwave plasma chemical vapour deposition of diamond like carbon thin films

1998 ◽  
Vol 278 (1-2) ◽  
pp. 130-134 ◽  
Author(s):  
D.S Patil ◽  
K Ramachandran ◽  
N Venkatramani ◽  
M Pandey ◽  
S Venkateswaran ◽  
...  
Keyword(s):  
Thin Films ◽  
Chemical Vapour Deposition ◽  
Vapour Deposition ◽  
Microwave Plasma ◽  
Chemical Vapour ◽  
Diamond Like Carbon ◽  
Plasma Chemical ◽  
Plasma Chemical Vapour Deposition ◽  
Carbon Thin Films
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