Modeling of non-stoichiometric silicon oxides obtained by plasma enhanced chemical vapour deposition process

2007 ◽  
Vol 515 (7-8) ◽  
pp. 3380-3386 ◽  
Author(s):  
M. Riera ◽  
J.A. Rodríguez ◽  
J. Barreto ◽  
C. Domínguez
Keyword(s):  
Chemical Vapour Deposition ◽  
Vapour Deposition ◽  
Chemical Vapour ◽  
Deposition Process ◽  
Silicon Oxides ◽  
Chemical Vapour Deposition Process

A chemical vapour deposition process for the production of carbon nanospheres

Carbon ◽  
2001 ◽  
Vol 39 (4) ◽  
pp. 621-626 ◽  
Author(s):  
Ph. Serp ◽  
R. Feurer ◽  
Ph. Kalck ◽  
Y. Kihn ◽  
J.L. Faria ◽  
...  
Keyword(s):  
Chemical Vapour Deposition ◽  
Vapour Deposition ◽  
Chemical Vapour ◽  
Deposition Process ◽  
Carbon Nanospheres ◽  
Chemical Vapour Deposition Process

Coating of Alumina Fibres With Aluminium Phosphate by a Continuous Chemical Vapour Deposition Process

2014 ◽  
Vol 20 (10-11-12) ◽  
pp. 388-398 ◽  
Author(s):  
Sabine Stöckel ◽  
Susann Ebert ◽  
Maike Böttcher ◽  
Andreas Seifert ◽  
Thomas Wamser ◽  
...  
Keyword(s):  
Chemical Vapour Deposition ◽  
Vapour Deposition ◽  
Chemical Vapour ◽  
Deposition Process ◽  
Aluminium Phosphate ◽  
Chemical Vapour Deposition Process ◽  
Continuous Chemical
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