High accuracy profile measurement of a machined surface by the combined method

Measurement ◽  
1996 ◽  
Vol 19 (1) ◽  
pp. 55-64 ◽  
Author(s):  
Wei Gao ◽  
Satoshi Kiyono
IEEE Access ◽  
2020 ◽  
Vol 8 ◽  
pp. 158727-158734
Author(s):  
Ning Chai ◽  
Ziqiang Yin ◽  
Jianhua Yao

2016 ◽  
Vol 27 (4) ◽  
pp. 045201 ◽  
Author(s):  
Zewei Cai ◽  
Xiaoli Liu ◽  
Xiang Peng ◽  
Zonghua Zhang ◽  
Hao Jiang ◽  
...  

2014 ◽  
Vol 100 (12) ◽  
pp. 1499-1507 ◽  
Author(s):  
Suguhiro Fukushima ◽  
Yoshiro Washikita ◽  
Tamotsu Sasaki ◽  
Shigemasa Nakagawa ◽  
Yasuhiko Buei ◽  
...  

1985 ◽  
Vol 51 (11) ◽  
pp. 2090-2095
Author(s):  
Yuzo MORI ◽  
Toshio HONGO ◽  
Yasuo HIGASHI ◽  
Kazuhisa SUGIYAMA ◽  
Kazuto YAMAUCHI ◽  
...  

2011 ◽  
Vol 383-390 ◽  
pp. 4884-4888
Author(s):  
Tian Ze Li ◽  
Ke Ping Hu ◽  
Luan Hou ◽  
Chuan Jiang ◽  
Heng Wei Lu ◽  
...  

This paper, innovative approaches are based on laser scanning and image analysis, presents an efficient composite technique for object profile extraction with real-time image processing. High throughput is obtained by algorithmic prefiltering to restrict the image area, while high accuracy is achieved by neural recontruction of the profile.


2005 ◽  
Vol 295-296 ◽  
pp. 265-270 ◽  
Author(s):  
Eiki Okuyama ◽  
Kimiyuki Mitsui

In industry, disk type products with a highly accurate surface such as silicon wafer and hard disk, are important elements. To measure these surfaces, an interferometer is used. However, this method generally needs a highly accurate reference surface. Another method to obtain the disk surface profile is by a scanning displacement sensor. However, the output of this sensor is influenced by the parasitic motions of the scanning along the reference guide. This article presents novel measurement procedures, a reversal method, an improved reversal method and a multi-prove method, to measure the circular profile on a disk without any references but with high accuracy.


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