Atmospheric pressure, radio frequency, parallel plate capacitively coupled plasma—excitation temperatures and analytical figures of merit

1997 ◽  
Vol 52 (13) ◽  
pp. 1983-1993 ◽  
Author(s):  
M.M. Rahman ◽  
M.W. Blades
Keyword(s):  
Radio Frequency ◽  
Atmospheric Pressure ◽  
Parallel Plate ◽  
Capacitively Coupled ◽  
Figures Of Merit ◽  
Plasma Excitation ◽  
Capacitively Coupled Plasma ◽  
Analytical Figures Of Merit

Rotation of Particles Trapped in the Sheath of a Radio-Frequency Capacitively Coupled Plasma

2004 ◽  
Vol 32 (2) ◽  
pp. 601-606 ◽  
Author(s):  
G.V. Paeva ◽  
R.P. Dahiya ◽  
G.M.W. Kroesen ◽  
W.W. Stoffels
Keyword(s):  
Radio Frequency ◽  
Capacitively Coupled ◽  
Capacitively Coupled Plasma
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