Rotation of Particles Trapped in the Sheath of a Radio-Frequency Capacitively Coupled Plasma

IEEE Transactions on Plasma Science ◽

10.1109/tps.2004.826141 ◽

2004 ◽

Vol 32 (2) ◽

pp. 601-606 ◽

Author(s):

G.V. Paeva ◽

R.P. Dahiya ◽

G.M.W. Kroesen ◽

W.W. Stoffels

Keyword(s):

Radio Frequency ◽

Capacitively Coupled ◽

Capacitively Coupled Plasma

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Atmospheric pressure, radio frequency, parallel plate capacitively coupled plasma—excitation temperatures and analytical figures of merit

Spectrochimica Acta Part B Atomic Spectroscopy ◽

10.1016/s0584-8547(97)00080-3 ◽

1997 ◽

Vol 52 (13) ◽

pp. 1983-1993 ◽

Author(s):

M.M. Rahman ◽

M.W. Blades

Keyword(s):

Radio Frequency ◽

Atmospheric Pressure ◽

Parallel Plate ◽

Capacitively Coupled ◽

Figures Of Merit ◽

Plasma Excitation ◽

Capacitively Coupled Plasma ◽

Analytical Figures Of Merit

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Strong Ionization Asymmetry in a Geometrically Symmetric Radio Frequency Capacitively Coupled Plasma Induced by Sawtooth Voltage Waveforms

Physical Review Letters ◽

10.1103/physrevlett.114.125002 ◽

2015 ◽

Vol 114 (12) ◽

Author(s):

Bastien Bruneau ◽

Timo Gans ◽

Deborah O’Connell ◽

Arthur Greb ◽

Erik V. Johnson ◽

...

Keyword(s):

Radio Frequency ◽

Capacitively Coupled ◽

Sawtooth Voltage ◽

Capacitively Coupled Plasma

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Dual radio frequency sources in a magnetized capacitively coupled plasma discharge

IEEE Transactions on Plasma Science ◽

10.1109/tps.2003.815483 ◽

2003 ◽

Vol 31 (4) ◽

pp. 471-478 ◽

Author(s):

S. Rauf

Keyword(s):

Radio Frequency ◽

Plasma Discharge ◽

Capacitively Coupled ◽

Capacitively Coupled Plasma

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Electron transport to a substrate in a radio frequency capacitively coupled plasma by the Boltzmann equation

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.580985 ◽

1998 ◽

Vol 16 (1) ◽

pp. 294-299 ◽

Author(s):

Jun Matsui ◽

Mari Shibata ◽

Nobuhiko Nakano ◽

Toshiaki Makabe

Keyword(s):

Boltzmann Equation ◽

Electron Transport ◽

Radio Frequency ◽

Capacitively Coupled ◽

The Boltzmann Equation ◽

Capacitively Coupled Plasma

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Low-power radio-frequency capacitively coupled plasma in air: an alternative spectral source?

10.1117/12.378643 ◽

2000 ◽

Author(s):

Sorin Anghel ◽

Alpar Simon ◽

Tiberiu Frentiu ◽

Emil A. Cordos

Keyword(s):

Low Power ◽

Radio Frequency ◽

Capacitively Coupled ◽

Capacitively Coupled Plasma

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Improvement of surface hydrophobicity on silicone rubber modified by CF4 radio frequency capacitively coupled plasma

Journal of Central South University of Technology ◽

10.1007/s11771-009-0062-y ◽

2009 ◽

Vol 16 (3) ◽

pp. 365-370 ◽

Author(s):

Song-hua Gao ◽

Ke-sheng Zhou ◽

Li-shi Wen

Keyword(s):

Radio Frequency ◽

Silicone Rubber ◽

Surface Hydrophobicity ◽

Capacitively Coupled ◽

Capacitively Coupled Plasma

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Physics of High-Density Radio Frequency Capacitively Coupled Plasma with Various Electrodes and Its Applications

Plasma Science and Technology - Basic Fundamentals and Modern Applications ◽

10.5772/intechopen.78387 ◽

2019 ◽

Author(s):

Yasunori Ohtsu

Keyword(s):

Radio Frequency ◽

High Density ◽

Capacitively Coupled ◽

Capacitively Coupled Plasma

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The discharge mode transition and O(5p1) production mechanism of pulsed radio frequency capacitively coupled plasma

Applied Physics Letters ◽

10.1063/1.4733662 ◽

2012 ◽

Vol 101 (4) ◽

pp. 043705 ◽

Author(s):

X. Y. Liu ◽

J. T. Hu ◽

J. H. Liu ◽

Z. L. Xiong ◽

D. W. Liu ◽

...

Keyword(s):

Radio Frequency ◽

Mode Transition ◽

Production Mechanism ◽

Discharge Mode ◽

Capacitively Coupled ◽

Capacitively Coupled Plasma

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Simulation Study of Hollow Cathode Enhanced Radio Frequency Capacitively Coupled Plasma Discharges

10.1109/icops35962.2018.9575977 ◽

2018 ◽

Author(s):

W. K. Tseng ◽

H. C. Chang ◽

C. Y. Chen ◽

K. C. Leou

Keyword(s):

Radio Frequency ◽

Simulation Study ◽

Hollow Cathode ◽

Plasma Discharges ◽

Capacitively Coupled ◽

Capacitively Coupled Plasma

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Vacuum DC flashover performance improvement by CF4 radio frequency capacitively coupled plasma

2021 IEEE International Conference on the Properties and Applications of Dielectric Materials (ICPADM) ◽

10.1109/icpadm49635.2021.9493985 ◽

2021 ◽

Author(s):

Chenxu Wang ◽

Xingyu Chen ◽

Bo Zhang ◽

Yuhao Sun ◽

Yanan Peng ◽

...

Keyword(s):

Radio Frequency ◽

Performance Improvement ◽

Capacitively Coupled ◽

Capacitively Coupled Plasma

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