Strong Ionization Asymmetry in a Geometrically Symmetric Radio Frequency Capacitively Coupled Plasma Induced by Sawtooth Voltage Waveforms
1997 ◽
Vol 52
(13)
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pp. 1983-1993
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2003 ◽
Vol 31
(4)
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pp. 471-478
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2004 ◽
Vol 32
(2)
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pp. 601-606
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1998 ◽
Vol 16
(1)
◽
pp. 294-299
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2009 ◽
Vol 16
(3)
◽
pp. 365-370
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