Microprobe AES Combined With Scanning RHEED Microscope

1990 ◽  
Vol 48 (2) ◽  
pp. 368-369
Author(s):  
Y. Sakai ◽  
S. Kitamura ◽  
A. D. Buonaquisti
Keyword(s):  
Electron Microscopy ◽  
Electron Diffraction ◽  
High Energy ◽  
Low Energy ◽  
Energy Electron ◽  
Diffraction Spot ◽  
High Energy Electron ◽  
Micro Structure ◽  
Fluorescent Screen ◽  
Low Energy Electron

Surface micro-structure analysis is very important for surface study in material science. Observations of surface atomic steps and reconstructed structures have been made using several techniques: reflection high energy electron microscopy (RHEEM), low energy electron reflection microscopy (LEERM) and low energy electron diffraction microscopy (LEEDM).In the present experiment, observations of surface micro-structures have been made using a scanning type reflection high energy electron diffraction (RHEED) microscopy. This technique has certain advantages of easy combinations with multiple surface analyzing techniques such as scanning electron microscopy (SEM), Auger electron spectroscopy (AES) and electron energy loss spectroscopy (ELS).A schematic diagram of the scanning RHEED microscope combined with the microprobe AES is shown in Fig. 1. RHEED patterns are observed on the fluorescent screen through a viewing port. To observe the micro-structure (scanning RHEED image or dark field image), a particular diffraction spot is selected by means of the other small fluorescent screen with an aperture.

Reflection high-energy electron diffraction and low energy electron diffraction studies of the homoepitaxially grown diamond (111) and (001) surfaces

1999 ◽  
Vol 8 (2-5) ◽  
pp. 693-700 ◽  
Author(s):  
Mikka Nishitani-Gamo ◽  
Isao Sakaguchi ◽  
Kian Ping Loh ◽  
Tomohide Takami ◽  
Isao Kusunoki ◽  
...  
Keyword(s):  
Electron Diffraction ◽  
High Energy ◽  
Low Energy ◽  
Energy Electron ◽  
High Energy Electron ◽  
Low Energy Electron Diffraction ◽  
Low Energy Electron

Coherent surface bremsstrahlung in low-energy-electron diffraction and reflection-high-energy-electron diffraction

1974 ◽  
Vol 9 (4) ◽  
pp. 1489-1498 ◽  
Author(s):  
M. S. Tomaš ◽  
A. A. Lucas ◽  
M. Šunjić ◽  
D. Juretić
Keyword(s):  
Electron Diffraction ◽  
High Energy ◽  
Low Energy ◽  
Energy Electron ◽  
High Energy Electron ◽  
Low Energy Electron Diffraction ◽  
Low Energy Electron

Surface morphology of homoepitaxially grown (111), (001), and (110) diamond studied by low energy electron diffraction and reflection high-energy electron diffraction

1999 ◽  
Vol 17 (5) ◽  
pp. 2991-3002 ◽  
Author(s):  
Mikka Nishitani-Gamo ◽  
Kian Ping Loh ◽  
Isao Sakaguchi ◽  
Tomohide Takami ◽  
Isao Kusunoki ◽  
...  
Keyword(s):  
Electron Diffraction ◽  
Surface Morphology ◽  
High Energy ◽  
Low Energy ◽  
Energy Electron ◽  
High Energy Electron ◽  
Low Energy Electron Diffraction ◽  
Low Energy Electron

Faceting in dilute oxygen atmospheres of group VIA metals

1972 ◽  
Vol 331 (1586) ◽  
pp. 429-443 ◽  
Keyword(s):  
Activation Energy ◽  
Electron Diffraction ◽  
Smooth Surface ◽  
High Energy ◽  
Low Energy ◽  
Energy Electron ◽  
High Energy Electron ◽  
Ordered Structures ◽  
Surface Parameters ◽  
Chemisorbed Oxygen

Certain planes of the group VIA metals, Cr, Mo and W, which are stable in ultra high vacua, readily develop facets when heated at low homologous temperatures in oxygen pressures as low as 10 -6 Pa. We have investigated the (100) and (110) surfaces of these metals by both low energy and reflexion mode high-energy electron diffraction. The (100) surfaces of tungsten and molybdenum readily develop facets which are of {110} and {211} type. The faceting is preceded by the formation of various ordered structures characteristic of chemisorbed oxygen. The (100) surface of chromium is stable in oxygen; however, the (110) surface develops {100} facets. No simple ordered structures are observed on the (110) surface of chromium before faceting and the facets soon disappear beneath epitaxially grown oxide. On all three metals the faceting process is reversible. The smooth surface may be regenerated by heating in the absence of oxygen. The activation energy for this process is high. The effect of faceting on surface parameters is discussed with particular reference to the growth of oxide.

Energy-filtered reflection electron microscopy and reflection high-energy electron diffraction on Zeiss 912 TEM

1993 ◽  
Vol 51 ◽  
pp. 580-581
Author(s):  
JINGYUE LIU
Keyword(s):  
Electron Microscopy ◽  
Electron Diffraction ◽  
Ccd Camera ◽  
Chromatic Aberration ◽  
High Energy ◽  
Energy Electron ◽  
Objective Lens ◽  
High Energy Electron ◽  
Resolution Limit ◽  
Reflection Electron Microscopy

In reflection electron microscopy (REM) and reflection high energy electron diffraction (RHEED) the average path length of the elastically scattered electrons in the crystal ranges from 10 -100 nm and a significant portion of the electrons in the RHEED pattern spots used for imaging is inelastically scattered. The excitations of surface plasmons, bulk plasmons and valence electrons involves energy losses of 10 ∽30 eV. Thus the image contrast and resolution in REM are degraded due to chromatic aberration of the objective lens. The use of energy filters in a TEM should offer significant improvement in resolution and contrast of REM images. We present here some new results on the investigation of resolution limit and contrast mechanisms in energy filtered REM images.The experiments were performed on a Zeiss 912 TEM fitted with an Omega magnetic imaging energy filter. Digital RHEED patterns and REM images were acquired into 1024 pixels by 1024 pixels via a Gatan 679 CCD camera fitted to the microscope.

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