Epitaxial Growth and Structural Characterization of Ceria Deposited by Atomic Layer Deposition on High-Surface Porous Yttria-Stabilized Zirconia Thin Films

2020 ◽  
Vol 20 (4) ◽  
pp. 2194-2201
Author(s):  
Mario F. Zscherp ◽  
Jonas Glaser ◽  
Celina Becker ◽  
Andreas Beyer ◽  
Pascal Cop ◽  
...  
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Epitaxial Growth ◽  
Structural Characterization ◽  
High Surface ◽  
Atomic Layer ◽  
Yttria Stabilized Zirconia ◽  
Stabilized Zirconia ◽  
Layer Deposition

scholarly journals Luminescent properties of europium titanium phosphate thin films deposited by atomic layer deposition

RSC Advances ◽  
2017 ◽  
Vol 7 (13) ◽  
pp. 8051-8059 ◽  
Author(s):  
Michael N. Getz ◽  
Per-Anders Hansen ◽  
Helmer Fjellvåg ◽  
Ola Nilsen
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Structural Characterization ◽  
Atomic Layer ◽  
Luminescent Properties ◽  
Titanium Phosphate ◽  
The Novel ◽  
Layer Deposition ◽  
Novel Material

Optical and structural characterization of luminescent thin films of the novel material europium titanium phosphate, deposited by atomic layer deposition.

Physical and electrical characterization of yttrium-stabilized zirconia (YSZ) thin films deposited by sputtering and atomic-layer deposition

2018 ◽  
Vol 29 (18) ◽  
pp. 15349-15357 ◽  
Author(s):  
Joel Molina-Reyes ◽  
Hugo Tiznado ◽  
Gerardo Soto ◽  
Monica Vargas-Bautista ◽  
David Dominguez ◽  
...  
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Electrical Characterization ◽  
Atomic Layer ◽  
Stabilized Zirconia ◽  
Layer Deposition

Ionic properties of ultrathin yttria-stabilized zirconia thin films fabricated by atomic layer deposition with water, oxygen, and ozone

2015 ◽  
Vol 589 ◽  
pp. 441-445 ◽  
Author(s):  
Ho Keun Kim ◽  
Dong Young Jang ◽  
Jun Woo Kim ◽  
Kiho Bae ◽  
Joon Hyung Shim
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Yttria Stabilized Zirconia ◽  
Stabilized Zirconia ◽  
Water Oxygen ◽  
Layer Deposition

Oxide ion conduction of yttria-stabilized zirconia films deposited by atomic layer deposition

2008 ◽  
Vol 1098 ◽  
Author(s):  
Cheng-Chieh Chao ◽  
Hong Huang ◽  
Joon Seok Park ◽  
Fritz B. Prinz
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Electron Beam Evaporation ◽  
Yttria Stabilized Zirconia ◽  
Ohmic Loss ◽  
Stabilized Zirconia ◽  
Oxide Ion Conductivity ◽  
Layer Deposition ◽  
Oxide Ion

AbstractYttria-stabilized zirconia (YSZ) is one of the most common electrolytes in high temperature solid oxide fuel cell (SOFCs). We utilize atomic layer deposition (ALD) to fabricate the electrolyte of SOFC, which may potentially improve several fundamental characteristics of SOFC. Recently, our group demonstrated that ultra-thin ALD YSZ SOFSs can deliver high power density at low temperatures [1]. These SOFCs demonstrated not only reduction of Ohmic loss, but also enhancement of surface kinetics.The focus of this work is to investigate the surface and bulk conduction characteristics of YSZ films produced by ALD. In plane conductivity was measured as a function of film thickness and temperature dependence. YSZ thin films were deposited on standard 4 ” quartz substrates with thicknesses ranging from 8 nanometers to 55 nanometers. Micro-electrodes were patterned on top of the ALD YSZ layer by standard photolithography process. The impedances of the YSZ thin films with different thicknesses were measured. We have observed higher conductivities for thinner films which were attributed to higher oxide ion conductivity in the vicinity of the surface, and similar phenomenon was observed with YSZ films produced by electron beam evaporation [2].

Atomic layer deposition of yttria-stabilized zirconia thin films for enhanced reactivity and stability of solid oxide fuel cells

Energy ◽  
2016 ◽  
Vol 116 ◽  
pp. 170-176 ◽  
Author(s):  
Joonho Park ◽  
Yeageun Lee ◽  
Ikwhang Chang ◽  
Gu Young Cho ◽  
Sanghoon Ji ◽  
...  
Keyword(s):  
Thin Films ◽  
Fuel Cells ◽  
Atomic Layer Deposition ◽  
Solid Oxide Fuel Cells ◽  
Atomic Layer ◽  
Solid Oxide ◽  
Yttria Stabilized Zirconia ◽  
Oxide Fuel ◽  
Stabilized Zirconia ◽  
Layer Deposition
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