Ionic properties of ultrathin yttria-stabilized zirconia thin films fabricated by atomic layer deposition with water, oxygen, and ozone

2015 ◽  
Vol 589 ◽  
pp. 441-445 ◽  
Author(s):  
Ho Keun Kim ◽  
Dong Young Jang ◽  
Jun Woo Kim ◽  
Kiho Bae ◽  
Joon Hyung Shim
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Yttria Stabilized Zirconia ◽  
Stabilized Zirconia ◽  
Water Oxygen ◽  
Layer Deposition

Oxide ion conduction of yttria-stabilized zirconia films deposited by atomic layer deposition

2008 ◽  
Vol 1098 ◽  
Author(s):  
Cheng-Chieh Chao ◽  
Hong Huang ◽  
Joon Seok Park ◽  
Fritz B. Prinz
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Electron Beam Evaporation ◽  
Yttria Stabilized Zirconia ◽  
Ohmic Loss ◽  
Stabilized Zirconia ◽  
Oxide Ion Conductivity ◽  
Layer Deposition ◽  
Oxide Ion

AbstractYttria-stabilized zirconia (YSZ) is one of the most common electrolytes in high temperature solid oxide fuel cell (SOFCs). We utilize atomic layer deposition (ALD) to fabricate the electrolyte of SOFC, which may potentially improve several fundamental characteristics of SOFC. Recently, our group demonstrated that ultra-thin ALD YSZ SOFSs can deliver high power density at low temperatures [1]. These SOFCs demonstrated not only reduction of Ohmic loss, but also enhancement of surface kinetics.The focus of this work is to investigate the surface and bulk conduction characteristics of YSZ films produced by ALD. In plane conductivity was measured as a function of film thickness and temperature dependence. YSZ thin films were deposited on standard 4 ” quartz substrates with thicknesses ranging from 8 nanometers to 55 nanometers. Micro-electrodes were patterned on top of the ALD YSZ layer by standard photolithography process. The impedances of the YSZ thin films with different thicknesses were measured. We have observed higher conductivities for thinner films which were attributed to higher oxide ion conductivity in the vicinity of the surface, and similar phenomenon was observed with YSZ films produced by electron beam evaporation [2].

Atomic layer deposition of yttria-stabilized zirconia thin films for enhanced reactivity and stability of solid oxide fuel cells

Energy ◽  
2016 ◽  
Vol 116 ◽  
pp. 170-176 ◽  
Author(s):  
Joonho Park ◽  
Yeageun Lee ◽  
Ikwhang Chang ◽  
Gu Young Cho ◽  
Sanghoon Ji ◽  
...  
Keyword(s):  
Thin Films ◽  
Fuel Cells ◽  
Atomic Layer Deposition ◽  
Solid Oxide Fuel Cells ◽  
Atomic Layer ◽  
Solid Oxide ◽  
Yttria Stabilized Zirconia ◽  
Oxide Fuel ◽  
Stabilized Zirconia ◽  
Layer Deposition

scholarly journals Formation of yttria-stabilized zirconia nanotubes by atomic layer deposition toward efficient solid electrolytes

2017 ◽  
Vol 4 (1) ◽  
Author(s):  
Eunsoo Kim ◽  
Hyunchul Kim ◽  
Changdeuck Bae ◽  
Daehee Lee ◽  
Jooho Moon ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Solid Electrolytes ◽  
Atomic Layer ◽  
Yttria Stabilized Zirconia ◽  
Stabilized Zirconia ◽  
Layer Deposition

Atomic layer deposition of MgO films on yttria-stabilized zirconia microtubes

2014 ◽  
Vol 553 ◽  
pp. 30-32 ◽  
Author(s):  
Marko Part ◽  
Aile Tamm ◽  
Jekaterina Kozlova ◽  
Hugo Mändar ◽  
Tanel Tätte ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Yttria Stabilized Zirconia ◽  
Stabilized Zirconia ◽  
Layer Deposition
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