Spatially Resolved Optical Emission and Modeling Studies of Microwave-Activated Hydrogen Plasmas Operating under Conditions Relevant for Diamond Chemical Vapor Deposition

Vapor Deposition ◽

Chemical Vapor ◽

Optical Emission ◽

Spatially Resolved ◽

Hydrogen Plasmas ◽

Modeling Studies ◽

Combined Spatially Resolved Optical Emission Imaging and Modeling Studies of Microwave-Activated H2/Ar and H2/Kr Plasmas Operating at Powers and Pressures Relevant for Diamond Chemical Vapor Deposition

The Journal of Physical Chemistry A ◽

10.1021/acs.jpca.8b12294 ◽

2019 ◽

Vol 123 (13) ◽

pp. 2544-2558 ◽

Cited By ~ 4

Author(s):

Edward J. D. Mahoney ◽

Sohail Mushtaq ◽

Michael N. R. Ashfold ◽

Yuri A. Mankelevich

Keyword(s):

Vapor Deposition ◽

Chemical Vapor ◽

Optical Emission ◽

Spatially Resolved ◽

Modeling Studies ◽

Study of microwave discharge at high power density conditions in diamond chemical vapor deposition reactor by optical emission spectroscopy

Diamond and Related Materials ◽

10.1016/j.diamond.2019.04.030 ◽

2019 ◽

Vol 97 ◽

pp. 107407 ◽

Cited By ~ 4

Author(s):

S.A. Bogdanov ◽

A.M. Gorbachev ◽

A.L. Vikharev ◽

D.B. Radishev ◽

M.A. Lobaev

Keyword(s):

Vapor Deposition ◽

Emission Spectroscopy ◽

Microwave Discharge ◽

Chemical Vapor ◽

Optical Emission ◽

High Power Density ◽

Chemical Vapor Deposition Reactor ◽

Analysis of optical emission spectroscopy in diamond chemical vapor deposition

Diamond and Related Materials ◽

10.1016/s0925-9635(00)00283-1 ◽

2000 ◽

Vol 9 (9-10) ◽

pp. 1716-1721 ◽

Cited By ~ 22

Author(s):

Y Liao ◽

C.H Li ◽

Z.Y Ye ◽

C Chang ◽

G.Z Wang ◽

...

Keyword(s):

Vapor Deposition ◽

Emission Spectroscopy ◽

Chemical Vapor ◽

Optical Emission ◽

Investigation of optical emission spectroscopy in diamond chemical vapor deposition by Monte Carlo simulation

Chinese Optics Letters ◽

10.3788/col20080603.0218 ◽

2008 ◽

Vol 6 (3) ◽

pp. 218-221

Author(s):

王志军 Zhijun Wang ◽

董丽芳 Lifang Dong ◽

李盼来 Panlai Li ◽

尚勇 Yong Shang ◽

何寿杰 Shoujie He

Keyword(s):

Monte Carlo Simulation ◽

Monte Carlo ◽

Vapor Deposition ◽

Emission Spectroscopy ◽

Chemical Vapor ◽

Optical Emission ◽

In situ plasma diagnostics study by means of optical emission spectroscopy for diamond chemical vapor deposition under high gravity conditions

Review of Scientific Instruments ◽

10.1063/1.1610783 ◽

2003 ◽

Vol 74 (10) ◽

pp. 4458-4461 ◽

Cited By ~ 2

Author(s):

Fabrizio Tappero ◽

Yoshiyuki Abe ◽

Giovanni Maizza

Keyword(s):

Plasma Diagnostics ◽

Vapor Deposition ◽

Emission Spectroscopy ◽

Chemical Vapor ◽

Optical Emission ◽

High Gravity ◽

Validating optical emission spectroscopy as a diagnostic of microwave activated CH4/Ar/H2 plasmas used for diamond chemical vapor deposition

Journal of Applied Physics ◽

10.1063/1.3078032 ◽

2009 ◽

Vol 105 (4) ◽

pp. 043302 ◽

Cited By ~ 88

Author(s):

Jie Ma ◽

Michael N. R. Ashfold ◽

Yuri A. Mankelevich

Keyword(s):

Vapor Deposition ◽

Emission Spectroscopy ◽

Chemical Vapor ◽

Optical Emission ◽

Optical Emission from Microwave Activated C/H/O Gas Mixtures for Diamond Chemical Vapor Deposition

The Journal of Physical Chemistry A ◽

10.1021/jp306191y ◽

2012 ◽

Vol 116 (38) ◽

pp. 9447-9458 ◽

Cited By ~ 18

Author(s):

James C. Richley ◽

Mark W. Kelly ◽

Michael N. R. Ashfold ◽

Yuri A. Mankelevich

Keyword(s):

Vapor Deposition ◽

Chemical Vapor ◽

Optical Emission ◽

Gas Mixtures ◽

Laser‐energy dependence of optical emission from radicals and atoms in laser‐induced chemical‐vapor deposition of SiC

Journal of Applied Physics ◽

10.1063/1.359989 ◽

1995 ◽

Vol 78 (5) ◽

pp. 3525-3527

Author(s):

Toru Mizunami ◽

Naotake Toyama ◽

Takahiro Sakaguchi

Keyword(s):

Energy Dependence ◽

Vapor Deposition ◽

Laser Energy ◽

Chemical Vapor ◽

Optical Emission

Optimizing the gas phase chemistry in a d.c. arcjet diamond chemical vapor deposition reactor

Thin Solid Films ◽

10.1016/0040-6090(94)90302-6 ◽

1994 ◽

Vol 253 (1-2) ◽

pp. 103-108 ◽

Cited By ~ 4

Author(s):

Scott W. Reeve ◽

Wayne A. Weimer

Keyword(s):

Gas Phase ◽

Vapor Deposition ◽

Chemical Vapor ◽

Chemical Vapor Deposition Reactor ◽

Gas Phase Chemistry ◽

Phase Chemistry ◽

Spatially resolved atomic hydrogen concentrations and molecular hydrogen temperature profiles in the chemical‐vapor deposition of diamond

Journal of Applied Physics ◽

10.1063/1.359939 ◽

1995 ◽

Vol 78 (6) ◽

pp. 3622-3634 ◽

Cited By ~ 73

Author(s):

L. L. Connell ◽

J. W. Fleming ◽

H.‐N. Chu ◽

D. J. Vestyck ◽

E. Jensen ◽

...

Keyword(s):

Vapor Deposition ◽

Atomic Hydrogen ◽

Molecular Hydrogen ◽

Chemical Vapor ◽

Temperature Profiles ◽

Spatially Resolved