Mechanical and Fracture Properties of Polycrystalline Graphene with Hydrogenated Grain Boundaries

Author(s):  
Mohan S. R. Elapolu ◽  
Alireza Tabarraei
1997 ◽  
Vol 473 ◽  
Author(s):  
David R. Clarke

ABSTRACTAs in other engineered structures, fracture occasionally occurs in integrated microelectronic circuits. Fracture can take a number of forms including voiding of metallic interconnect lines, decohesion of interfaces, and stress-induced microcracking of thin films. The characteristic feature that distinguishes such fracture phenomena from similar behaviors in other engineered structures is the length scales involved, typically micron and sub-micron. This length scale necessitates new techniques for measuring mechanical and fracture properties. In this work, we describe non-contact optical techniques for probing strains and a microscopic “decohesion” test for measuring interface fracture resistance in integrated circuits.


JOM ◽  
2015 ◽  
Vol 67 (5) ◽  
pp. 1054-1063 ◽  
Author(s):  
D. G. Sanders ◽  
P. Edwards ◽  
A. M. Cantrell ◽  
K. Gangwar ◽  
M. Ramulu

Sign in / Sign up

Export Citation Format

Share Document