scholarly journals Demonstration of Sputtering Atomic Layer Augmented Deposition: Aluminum Oxide–Copper Dielectric–Metal Nanocomposite Thin Films

2020 ◽  
Vol 12 (12) ◽  
pp. 14280-14288
Author(s):  
Brian Giraldo ◽  
David M. Fryauf ◽  
Brandon Cheney ◽  
Jacob H. Sands ◽  
Nobuhiko P. Kobayashi
Keyword(s):  
Thin Films ◽  
Aluminum Oxide ◽  
Atomic Layer ◽  
Nanocomposite Thin Films ◽  
Metal Nanocomposite

scholarly journals W:Al2O3 Nanocomposite Thin Films with Tunable Optical Properties Prepared by Atomic Layer Deposition

2016 ◽  
Vol 120 (27) ◽  
pp. 14681-14689 ◽  
Author(s):  
Shaista Babar ◽  
Anil U. Mane ◽  
Angel Yanguas-Gil ◽  
Elham Mohimi ◽  
Richard T. Haasch ◽  
...  
Keyword(s):  
Thin Films ◽  
Optical Properties ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Layer Deposition ◽  
Nanocomposite Thin Films ◽  
Tunable Optical Properties

Microstructure of pulsed laser deposited ceramic–metal and polymer–metal nanocomposite thin films

2004 ◽  
Vol 79 (4-6) ◽  
pp. 1233-1235 ◽  
Author(s):  
J. Faupel ◽  
C. Fuhse ◽  
A. Meschede ◽  
C. Herweg ◽  
H.U. Krebs ◽  
...  
Keyword(s):  
Thin Films ◽  
Pulsed Laser ◽  
Nanocomposite Thin Films ◽  
Polymer Metal ◽  
Metal Nanocomposite

scholarly journals Aluminum tri-isopropoxide as an alternative precursor for atomic layer deposition of aluminum oxide thin films

2019 ◽  
Vol 37 (4) ◽  
pp. 040901 ◽  
Author(s):  
Fatemeh S. M. Hashemi ◽  
LiAo Cao ◽  
Felix Mattelaer ◽  
Timo Sajavaara ◽  
J. Ruud van Ommen ◽  
...  
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Aluminum Oxide ◽  
Atomic Layer ◽  
Oxide Thin Films ◽  
Layer Deposition

scholarly journals Nucleation Effects in the Atomic Layer Deposition of Nickel–Aluminum Oxide Thin Films

2020 ◽  
Vol 32 (5) ◽  
pp. 1925-1936 ◽  
Author(s):  
Jon G. Baker ◽  
Joel R. Schneider ◽  
James A. Raiford ◽  
Camila de Paula ◽  
Stacey F. Bent
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Aluminum Oxide ◽  
Atomic Layer ◽  
Nickel Aluminum ◽  
Oxide Thin Films ◽  
Layer Deposition
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