Autonomous Construction of Phase Diagrams of Block Copolymers by Theory-Assisted Active Machine Learning

2021 ◽  
pp. 598-602
Author(s):  
Shuochen Zhao ◽  
Tianyun Cai ◽  
Liangshun Zhang ◽  
Weihua Li ◽  
Jiaping Lin
2020 ◽  
Vol 1862 (9) ◽  
pp. 183350
Author(s):  
Mohammadreza Aghaaminiha ◽  
Sara Akbar Ghanadian ◽  
Ehsan Ahmadi ◽  
Amir M. Farnoud

2021 ◽  
Author(s):  
Gayashani Ginige ◽  
Youngdong Song ◽  
Brian Olsen ◽  
Erik Luber ◽  
Cafer Yavuz ◽  
...  

Self-assembly of block copolymers (BCP) is an alternative patterning technique that promises sublithographic resolution and density multiplication. Defectivity of the resulting nanopatterns remains too high for many applications in microelectronics, and is exacerbated by small variations of processing parameters, such as film thickness, and fluctuations of solvent vapour pressure and temperature, among others. In this work, a solvent vapor annealing (SVA) flow-controlled system is combined with Design of Experiments (DOE) and machine learning (ML) approaches.<br>


2021 ◽  
Author(s):  
Gayashani Ginige ◽  
Youngdong Song ◽  
Brian Olsen ◽  
Erik Luber ◽  
Cafer Yavuz ◽  
...  

Self-assembly of block copolymers (BCP) is an alternative patterning technique that promises sublithographic resolution and density multiplication. Defectivity of the resulting nanopatterns remains too high for many applications in microelectronics, and is exacerbated by small variations of processing parameters, such as film thickness, and fluctuations of solvent vapour pressure and temperature, among others. In this work, a solvent vapor annealing (SVA) flow-controlled system is combined with Design of Experiments (DOE) and machine learning (ML) approaches.<br>


2021 ◽  
Author(s):  
Srilok Sriniva ◽  
Rohit Batra ◽  
Duan Luo ◽  
Troy Loeffler ◽  
Sukriti Manna ◽  
...  

Abstract A central feature of materials synthesis is the concept of phase diagrams. Phase diagrams are an invaluable tool for material synthesis and provide information on the phases of the material at any given thermodynamic condition (i.e., state variables such as pressure, temperature and composition). Conventional phase diagram generation involves experimentation to provide an initial estimate of the set of thermodynamically accessible phases and their boundaries, followed by use of phenomenological models to interpolate between the available experimental data points and extrapolate to experimentally inaccessible regions. Such an approach, combined with high throughput first-principles calculations and data-mining techniques, has led to exhaustive thermodynamic databases (e.g. compatible with the CALPHAD method), albeit focused on the reduced set of phases observed at distinct thermodynamic equilibria. In contrast, materials during their synthesis, operation, or processing, may not reach their thermodynamic equilibrium state but, instead, remain trapped in a local (metastable) free energy minimum, that may exhibit desirable properties. A phase diagram that maps these metastable phases and their thermodynamic behavior is highly desirable but currently lacking, due to the vast configurational landscape. Here, we introduce an automated workflow that integrates first-principles physics and atomistic simulations with machine learning (ML), and high-performance computing to allow rapid exploration of the metastable phases of a given elemental composition and construct "metastable" phase diagrams for materials far-from-equilibrium. Using carbon, a prototypical system with a vast number of metastable phases without parent in equilibrium, we demonstrate automated metastable phase diagram construction to map hundreds of metastable states ranging from near equilibrium to those far-from-equilibrium (400 meV/atom). Moreover, we incorporate the free energy calculations into a neural-network-based learning of the equations of state that allows for efficient construction of metastable phase diagrams. We use the metastable phase diagram and identify domains of relative stability and synthesizability of metastable materials. High temperature high pressure experiments using a diamond anvil cell on graphite sample coupled with high-resolution transmission electron microscopy (HRTEM) confirm our metastable phase predictions. The workflow presented here is general and broadly applicable to single and multi-component systems.


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