scholarly journals Radio Frequency Plasma-Enhanced Reactive Magnetron Sputtering Deposition of α-SiNx on Photonic Crystal—Laser Diodes for Facet Passivation

ACS Omega ◽  
2019 ◽  
Vol 4 (23) ◽  
pp. 20205-20211
Author(s):  
Yuancheng Wang ◽  
Hongwei Qu ◽  
Yufei Wang ◽  
Fengxin Dong ◽  
Zhonghao Chen ◽  
...  
2014 ◽  
Vol 39 (8) ◽  
pp. 2391 ◽  
Author(s):  
L. Liu ◽  
Y. Liu ◽  
H. W. Qu ◽  
Y. F. Wang ◽  
H. L. Wang ◽  
...  

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