Effects of radio-frequency plasma on structure and properties in Ti film deposition by dc and pulsed dc magnetron sputtering

Toshiyuki Oya; Eiji Kusano

doi:10.1016/j.tsf.2009.03.055

Effects of radio-frequency plasma on structure and properties in Ti film deposition by dc and pulsed dc magnetron sputtering

Thin Solid Films ◽

10.1016/j.tsf.2009.03.055 ◽

2009 ◽

Vol 517 (20) ◽

pp. 5837-5843 ◽

Cited By ~ 18

Author(s):

Toshiyuki Oya ◽

Eiji Kusano

Keyword(s):

Magnetron Sputtering ◽

Radio Frequency ◽

Film Deposition ◽

Radio Frequency Plasma ◽

Structure And Properties ◽

Dc Magnetron Sputtering ◽

Pulsed Dc ◽

Frequency Plasma ◽

Pulsed Dc Magnetron Sputtering

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Structure and properties of uranium oxide thin films deposited by pulsed dc magnetron sputtering

Applied Surface Science ◽

10.1016/j.apsusc.2014.02.106 ◽

2014 ◽

Vol 301 ◽

pp. 475-480 ◽

Cited By ~ 15

Author(s):

Jianliang Lin ◽

Isaac Dahan ◽

Billy Valderrama ◽

Michele V. Manuel

Keyword(s):

Thin Films ◽

Magnetron Sputtering ◽

Uranium Oxide ◽

Structure And Properties ◽

Dc Magnetron Sputtering ◽

Oxide Thin Films ◽

Pulsed Dc ◽

Pulsed Dc Magnetron Sputtering

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Structure and properties of CrSiCN coatings deposited by pulsed dc magnetron sputtering for wear and erosion protection

Surface and Coatings Technology ◽

10.1016/j.surfcoat.2015.12.068 ◽

2016 ◽

Vol 287 ◽

pp. 44-54 ◽

Cited By ~ 12

Author(s):

Jianliang Lin ◽

Jaeho Jang ◽

In-wook Park ◽

Ronghua Wei

Keyword(s):

Magnetron Sputtering ◽

Structure And Properties ◽

Dc Magnetron Sputtering ◽

Pulsed Dc ◽

Pulsed Dc Magnetron Sputtering ◽

Erosion Protection

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Structure and properties of Ti films deposited by dc magnetron sputtering, pulsed dc magnetron sputtering and cathodic arc evaporation

Surface and Coatings Technology ◽

10.1016/j.surfcoat.2016.06.083 ◽

2016 ◽

Vol 304 ◽

pp. 51-56 ◽

Cited By ~ 14

Author(s):

Chao Yang ◽

Bailing Jiang ◽

Zheng Liu ◽

Juan Hao ◽

Lin Feng

Keyword(s):

Magnetron Sputtering ◽

Structure And Properties ◽

Dc Magnetron Sputtering ◽

Pulsed Dc ◽

Cathodic Arc Evaporation ◽

Pulsed Dc Magnetron Sputtering ◽

Arc Evaporation ◽

Cathodic Arc ◽

Ti Films

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Structure and properties of CrSiN nanocomposite coatings deposited by hybrid modulated pulsed power and pulsed dc magnetron sputtering

Surface and Coatings Technology ◽

10.1016/j.surfcoat.2012.11.053 ◽

2013 ◽

Vol 216 ◽

pp. 251-258 ◽

Cited By ~ 41

Author(s):

Jianliang Lin ◽

Bo Wang ◽

Yixiang Ou ◽

William D. Sproul ◽

Isaac Dahan ◽

...

Keyword(s):

Magnetron Sputtering ◽

Pulsed Power ◽

Nanocomposite Coatings ◽

Structure And Properties ◽

Dc Magnetron Sputtering ◽

Pulsed Dc ◽

Pulsed Dc Magnetron Sputtering

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Characterization of Ti–Zr–V thin films deposited by DC and unipolar pulsed DC magnetron sputtering

Vacuum ◽

10.1016/j.vacuum.2021.110200 ◽

2021 ◽

Vol 188 ◽

pp. 110200

Author(s):

Sihui Wang ◽

Wei Wei ◽

Yonghao Gao ◽

Haibin Pan ◽

Yong Wang

Keyword(s):

Thin Films ◽

Magnetron Sputtering ◽

Dc Magnetron Sputtering ◽

Pulsed Dc ◽

Pulsed Dc Magnetron Sputtering

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Effect of the substrate temperature on the properties of Ga-doped ZnO films for photovoltaic cell applications deposited by a pulsed DC magnetron sputtering with a rotating cylindrical target

Vacuum ◽

10.1016/j.vacuum.2012.03.002 ◽

2012 ◽

Vol 86 (10) ◽

pp. 1423-1427 ◽

Cited By ~ 17

Author(s):

Ji-Hyeon Park ◽

Beom-Ki Shin ◽

Hong-Man Moon ◽

Min-Jung Lee ◽

Kang-Il Park ◽

...

Keyword(s):

Magnetron Sputtering ◽

Substrate Temperature ◽

Photovoltaic Cell ◽

Zno Films ◽

Dc Magnetron Sputtering ◽

Pulsed Dc ◽

Cylindrical Target ◽

Doped Zno ◽

Pulsed Dc Magnetron Sputtering

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Low Frequency Noise Characteristics on Al/Nb2O5/p-type Schottky Diode Fabricated by Pulsed DC Magnetron Sputtering

Molecular Crystals and Liquid Crystals ◽

10.1080/15421406.2013.853551 ◽

2013 ◽

Vol 586 (1) ◽

pp. 168-178

Author(s):

Hyun Gon Oh ◽

Kyung Soo Kim ◽

Jimi Eom ◽

Sang Jik Kwon ◽

Eou Sik Cho ◽

...

Keyword(s):

Magnetron Sputtering ◽

Schottky Diode ◽

Low Frequency ◽

Frequency Noise ◽

Low Frequency Noise ◽

Dc Magnetron Sputtering ◽

Noise Characteristics ◽

Pulsed Dc ◽

Pulsed Dc Magnetron Sputtering ◽

P Type

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High Mobility Titanium-doped Indium Oxide for Use in Tandem Solar Cells Deposited via Pulsed DC Magnetron Sputtering

Energy Procedia ◽

10.1016/j.egypro.2014.12.357 ◽

2014 ◽

Vol 60 ◽

pp. 148-155 ◽

Cited By ~ 6

Author(s):

B. Grew ◽

J.W. Bowers ◽

F. Lisco ◽

N. Arnou ◽

J.M. Walls ◽

...

Keyword(s):

Solar Cells ◽

Magnetron Sputtering ◽

Indium Oxide ◽

High Mobility ◽

Dc Magnetron Sputtering ◽

Tandem Solar Cells ◽

Pulsed Dc ◽

Pulsed Dc Magnetron Sputtering

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Growth of Highly -Oriented Crystalline Silicon Thin Films on Molybdenum by Pulsed dc Magnetron Sputtering

Solid State Phenomena ◽

10.4028/www.scientific.net/ssp.93.287 ◽

2003 ◽

Vol 93 ◽

pp. 287-294

Author(s):

P. Reinig ◽

F. Fenske ◽

A. Schöpke ◽

B. Selle ◽

W. Fuhs ◽

...

Keyword(s):

Thin Films ◽

Magnetron Sputtering ◽

Crystalline Silicon ◽

Dc Magnetron Sputtering ◽

Silicon Thin Films ◽

Pulsed Dc ◽

Pulsed Dc Magnetron Sputtering

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Time-resolved optical emission spectroscopy of pulsed DC magnetron sputtering plasmas

Journal of Physics D Applied Physics ◽

10.1088/0022-3727/38/11/018 ◽

2005 ◽

Vol 38 (11) ◽

pp. 1769-1780 ◽

Cited By ~ 24

Author(s):

J Lopez ◽

W Zhu ◽

A Freilich ◽

A Belkind ◽

K Becker

Keyword(s):

Magnetron Sputtering ◽

Emission Spectroscopy ◽

Optical Emission Spectroscopy ◽

Optical Emission ◽

Dc Magnetron Sputtering ◽

Time Resolved ◽

Pulsed Dc ◽

Pulsed Dc Magnetron Sputtering

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