Ultraviolet‐light irradiation of a radio‐frequency plasma applied to fluoropolymer sputtering deposition

1988 ◽  
Vol 64 (5) ◽  
pp. 2700-2705 ◽  
Author(s):  
Iwao Sugimoto ◽  
Shojiro Miyake
Keyword(s):  
Radio Frequency ◽  
Ultraviolet Light ◽  
Light Irradiation ◽  
Radio Frequency Plasma ◽  
Sputtering Deposition ◽  
Frequency Plasma ◽  
Ultraviolet Light Irradiation

Microstructure Evolution Induced by Ultraviolet Light Irradiation in Ti-Si Codoped Diamond-like Carbon films

2014 ◽  
Vol 29 (9) ◽  
pp. 941
Author(s):  
JIANG Jin-Long ◽  
WANG Qiong ◽  
HUANG Hao ◽  
ZHANG Xia ◽  
WANG Yu-Bao ◽  
...  
Keyword(s):  
Ultraviolet Light ◽  
Microstructure Evolution ◽  
Carbon Films ◽  
Light Irradiation ◽  
Diamond Like Carbon ◽  
Ultraviolet Light Irradiation

scholarly journals Modification of a Fur Semi-finished Sheepskins by Radio Frequency Plasma in an Inert Gas Medium

2021 ◽  
Vol 1923 (1) ◽  
pp. 012020
Author(s):  
E A Pankova ◽  
F S Sharifullin ◽  
G R Rakhmatullina ◽  
R R Shagivalieva ◽  
V S Zheltukhin
Keyword(s):  
Radio Frequency ◽  
Inert Gas ◽  
Radio Frequency Plasma ◽  
Frequency Plasma ◽  
Gas Medium

Low-Temperature Growth of Ferroelectric Hf0.5Zr0.5O2 Thin Films Assisted by Deep Ultraviolet Light Irradiation

2021 ◽  
Vol 3 (3) ◽  
pp. 1244-1251
Author(s):  
Hyunjin Joh ◽  
Gopinathan Anoop ◽  
Won-June Lee ◽  
Dipjyoti Das ◽  
Jun Young Lee ◽  
...  
Keyword(s):  
Thin Films ◽  
Low Temperature ◽  
Ultraviolet Light ◽  
Light Irradiation ◽  
Temperature Growth ◽  
Low Temperature Growth ◽  
Ultraviolet Light Irradiation ◽  
Deep Ultraviolet

Effects of Atmosphere and Ultraviolet Light Irradiation on Chemical Mechanical Polishing Characteristics of SiC Wafers

2012 ◽  
Vol 51 ◽  
pp. 05EF05 ◽  
Author(s):  
Osamu Ohnishi ◽  
Toshiro Doi ◽  
Syuhei Kurokawa ◽  
Tsutomu Yamazaki ◽  
Michio Uneda ◽  
...  
Keyword(s):  
Ultraviolet Light ◽  
Chemical Mechanical Polishing ◽  
Mechanical Polishing ◽  
Light Irradiation ◽  
Ultraviolet Light Irradiation
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