Characterization of Ultra-Thin Hafnium Oxide Films Grown on Silicon by Atomic Layer Deposition Using Tetrakis(ethylmethyl-amino) Hafnium and Water Precursors

2007 ◽  
Vol 19 (13) ◽  
pp. 3127-3138 ◽  
Author(s):  
Y. Wang ◽  
M.-T. Ho ◽  
L. V. Goncharova ◽  
L. S. Wielunski ◽  
S. Rivillon-Amy ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Hafnium Oxide ◽  
Oxide Films ◽  
Atomic Layer ◽  
Layer Deposition

Properties of hafnium oxide films grown by atomic layer deposition from hafnium tetraiodide and oxygen

2002 ◽  
Vol 92 (10) ◽  
pp. 5698-5703 ◽  
Author(s):  
Kaupo Kukli ◽  
Mikko Ritala ◽  
Jonas Sundqvist ◽  
Jaan Aarik ◽  
Jun Lu ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Hafnium Oxide ◽  
Oxide Films ◽  
Atomic Layer ◽  
Layer Deposition

Effect of selected atomic layer deposition parameters on the structure and dielectric properties of hafnium oxide films

2004 ◽  
Vol 96 (9) ◽  
pp. 5298-5307 ◽  
Author(s):  
Kaupo Kukli ◽  
Jaan Aarik ◽  
Mikko Ritala ◽  
Teet Uustare ◽  
Timo Sajavaara ◽  
...  
Keyword(s):  
Dielectric Properties ◽  
Atomic Layer Deposition ◽  
Hafnium Oxide ◽  
Oxide Films ◽  
Atomic Layer ◽  
Deposition Parameters ◽  
Layer Deposition

Optical and electrical characterization of hafnium oxide deposited by liquid injection atomic layer deposition

2007 ◽  
Vol 47 (4-5) ◽  
pp. 825-829 ◽  
Author(s):  
P. Taechakumput ◽  
S. Taylor ◽  
O. Buiu ◽  
R.J. Potter ◽  
P.R. Chalker ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Hafnium Oxide ◽  
Electrical Characterization ◽  
Atomic Layer ◽  
Layer Deposition ◽  
Liquid Injection

Infrared characterization of hafnium oxide grown by atomic layer deposition using ozone as the oxygen precursor

2007 ◽  
Vol 90 (2) ◽  
pp. 022906 ◽  
Author(s):  
Y. Wang ◽  
M. Dai ◽  
M.-T. Ho ◽  
L. S. Wielunski ◽  
Y. J. Chabal
Keyword(s):  
Atomic Layer Deposition ◽  
Hafnium Oxide ◽  
Atomic Layer ◽  
Layer Deposition

Atomic layer deposition of thin hafnium oxide films using a carbon free precursor

2003 ◽  
Vol 93 (1) ◽  
pp. 712-718 ◽  
Author(s):  
J. F. Conley ◽  
Y. Ono ◽  
D. J. Tweet ◽  
W. Zhuang ◽  
R. Solanki
Keyword(s):  
Atomic Layer Deposition ◽  
Hafnium Oxide ◽  
Oxide Films ◽  
Atomic Layer ◽  
Layer Deposition
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