Atomic layer deposition of thin hafnium oxide films using a carbon free precursor
Keyword(s):
Keyword(s):
Keyword(s):
Keyword(s):
2009 ◽
Vol 12
(9)
◽
pp. G50
◽
Keyword(s):
Keyword(s):
2002 ◽
Vol 416
(1-2)
◽
pp. 72-79
◽