Understanding Acid Reaction and Diffusion in Chemically Amplified Photoresists: An Approach at the Molecular Level

2011 ◽  
Vol 115 (42) ◽  
pp. 20367-20374 ◽  
Author(s):  
Pedro J. Rodríguez-Cantó ◽  
Ulrich Nickel ◽  
Rafael Abargues
Author(s):  
Mingrui Yang ◽  
Junyi Xiang ◽  
Chenguang Bai ◽  
Xuangeng Zhou ◽  
Zhongci Liu ◽  
...  

ACS Nano ◽  
2010 ◽  
Vol 4 (12) ◽  
pp. 7349-7357 ◽  
Author(s):  
Nina Balke ◽  
Stephen Jesse ◽  
Yoongu Kim ◽  
Leslie Adamczyk ◽  
Ilia N. Ivanov ◽  
...  

2019 ◽  
Author(s):  
Miloslav Pekař

Self-balancing diffusion is a concept which restricts the introduction of extents of reactions. This concept is analyzed in detail for mass- and molar-based balances of reaction-diffusion mixtures, in relation to non-self-balancing cases, and with respect to its practical consequences. A note on a recent generalization of the concept of reaction and diffusion extents is also included.<br>


2018 ◽  
Vol 123 (15) ◽  
pp. 155301 ◽  
Author(s):  
Mengkun Yue ◽  
Xuelin Dong ◽  
Xufei Fang ◽  
Xue Feng

Sign in / Sign up

Export Citation Format

Share Document