Understanding Acid Reaction and Diffusion in Chemically Amplified Photoresists: An Approach at the Molecular Level
2011 ◽
Vol 115
(42)
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pp. 20367-20374
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1991 ◽
Vol 9
(6)
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pp. 3380
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Keyword(s):
2019 ◽
Vol 470
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pp. 854-860
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2019 ◽
2006 ◽
Vol 3
(3)
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pp. 173-197
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1994 ◽
Vol 155-156
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pp. 307-318
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