Dissociation of Ethoxysilane and Methoxysilane on Si(001)-2 × 1 and Si(111)-7 × 7 at Room Temperature: A Comparative Study Using Synchrotron Radiation Photoemission

2014 ◽  
Vol 118 (42) ◽  
pp. 24397-24406 ◽  
Author(s):  
Héloise Tissot ◽  
Jean-Jacques Gallet ◽  
Fabrice Bournel ◽  
Debora Pierucci ◽  
Mathieu Silly ◽  
...  
Keyword(s):  
Synchrotron Radiation ◽  
Comparative Study ◽  
Room Temperature ◽  
Synchrotron Radiation Photoemission

scholarly journals Si(111)-Pt interface at room temperature: A synchrotron radiation photoemission study

1982 ◽  
Vol 25 (6) ◽  
pp. 3627-3636 ◽  
Author(s):  
G. Rossi ◽  
I. Abbati ◽  
L. Braicovich ◽  
I. Lindau ◽  
W. E. Spicer
Keyword(s):  
Synchrotron Radiation ◽  
Room Temperature ◽  
Photoemission Study ◽  
Synchrotron Radiation Photoemission

SYNCHROTRON RADIATION PHOTOEMISSION AND INFRARED SPECTROSCOPY STUDY OF ADSORPTION AND DECOMPOSITION OF DICHLOROSILANE ON Si(100)(2 × 1)

2002 ◽  
Vol 09 (02) ◽  
pp. 803-808 ◽  
Author(s):  
NOZOMU KAMAKURA ◽  
MASANORI SHINOHARA ◽  
HAYATO WATANABE ◽  
TAKAYUKI KUWANO ◽  
AKIO SEYAMA ◽  
...  
Keyword(s):  
Infrared Spectroscopy ◽  
Synchrotron Radiation ◽  
Infrared Absorption ◽  
Room Temperature ◽  
Infrared Absorption Spectroscopy ◽  
Spectroscopy Study ◽  
Stretching Vibration ◽  
Synchrotron Radiation Photoemission ◽  
Surface Comparison

We have used synchrotron radiation photoemission (SR-PES) and infrared absorption spectroscopy (IRAS) to investigate in situ the adsorption and decomposition of SiH 2 Cl 2 on Si (100)(2 × 1). Si 2p core level photoemission spectra and IRAS spectra in the Si–H stretching vibration region of the surface exposed to SiH 2 Cl 2 at room temperature have been measured to elucidate how SiH 2 Cl 2 adsorbs on the surface. PES data show that monochloride (SiCl) and hydride species ( SiH x) are generated upon dichlorosilane adsorption. IRAS data demonstrate that at initial stages of SiH 2 Cl 2 adsorption, the monohydride, the dihydride ( SiH 2) and the Cl-substituted hydride (–SiHCl) are populated on the surface. Comparison of PES and IRAS data indicates that Si–Cl bonds of the SiH 2 Cl 2 molecule are readily ruptured upon adsorption of dichlorosilane on the Si (100)(2 × 1).

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