Substrate Damage in Film Thickness Measurement by Beam Interferometry

Nature ◽

10.1038/184354b0 ◽

1959 ◽

Vol 184 (4683) ◽

pp. 354-355 ◽

Author(s):

G. DAVID SCOTT

Keyword(s):

Film Thickness ◽

Thickness Measurement ◽

Film Thickness Measurement

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Packaging. Flexible aluminium tubes. Internal lacquer film thickness measurement method

10.3403/02133732 ◽

2000 ◽

Keyword(s):

Film Thickness ◽

Measurement Method ◽

Thickness Measurement ◽

Film Thickness Measurement

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Packaging. Flexible aluminium tubes. Internal lacquer film thickness measurement method

10.3403/30163062 ◽

2009 ◽

Keyword(s):

Film Thickness ◽

Measurement Method ◽

Thickness Measurement ◽

Film Thickness Measurement

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A simple profilometer for film thickness measurement

Review of Scientific Instruments ◽

10.1063/1.1143897 ◽

1993 ◽

Vol 64 (8) ◽

pp. 2405-2406 ◽

Author(s):

J. W. Wood ◽

R. D. Redin

Keyword(s):

Film Thickness ◽

Thickness Measurement ◽

Film Thickness Measurement

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Nanoscale film thickness measurement based on weak measurement

Review of Scientific Instruments ◽

10.1063/5.0025552 ◽

2020 ◽

Vol 91 (12) ◽

pp. 123111

Author(s):

Zirui Qin ◽

Qinggang Liu ◽

Chong Yue ◽

Yaopu Lang ◽

Xinglin Zhou

Keyword(s):

Film Thickness ◽

Thickness Measurement ◽

Weak Measurement ◽

Film Thickness Measurement

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Oil film thickness measurement device at multiple points using LIF method with optical fiber Masaaki Takiguchi, Akiyoshi Uratsuka, Naonori Tajima (Musashi Institute of Technology)

JSAE Review ◽

10.1016/s0389-4304(96)80660-6 ◽

1996 ◽

Vol 17 (4) ◽

pp. 452

Keyword(s):

Optical Fiber ◽

Film Thickness ◽

Thickness Measurement ◽

Measurement Device ◽

Multiple Points ◽

Oil Film ◽

Institute Of Technology ◽

Film Thickness Measurement

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In situ film thickness measurement and gaseous species detection in diamond CVD processes using FTIR emission spectroscopy

Surface and Coatings Technology ◽

10.1016/0257-8972(94)90192-9 ◽

1994 ◽

Vol 68-69 ◽

pp. 394-397 ◽

Author(s):

S. Jin ◽

L. Bourget ◽

E. Sevillano

Keyword(s):

Film Thickness ◽

Emission Spectroscopy ◽

Thickness Measurement ◽

Gaseous Species ◽

Species Detection ◽

Film Thickness Measurement

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Multilayer thin film thickness measurement using sensitivity separation method

Optics Communications ◽

10.1016/j.optcom.2010.05.054 ◽

2010 ◽

Vol 283 (20) ◽

pp. 3989-3993 ◽

Author(s):

Xing-zhi Gong ◽

Liang Cheng ◽

Fei-hong Yu

Keyword(s):

Thin Film ◽

Film Thickness ◽

Thickness Measurement ◽

Separation Method ◽

Multilayer Thin Film ◽

Thin Film Thickness ◽

Film Thickness Measurement

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FILM THICKNESS MEASUREMENT OF MECHANICAL SEAL BASED ON CASCADED ARTIFICIAL NEURAL NETWORK RECOGNITION MODEL

International Journal on Smart Sensing and Intelligent Systems ◽

10.21307/ijssis-2017-737 ◽

2014 ◽

Vol 7 (4) ◽

pp. 1870-1889 ◽

Author(s):

Erqing Zhang ◽

Pan Fu ◽

Kesi LI ◽

Xiaohui Li ◽

Zhongrong Zhou

Keyword(s):

Neural Network ◽

Artificial Neural Network ◽

Film Thickness ◽

Thickness Measurement ◽

Mechanical Seal ◽

Recognition Model ◽

Artificial Neural ◽

Film Thickness Measurement

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Spectroscopic thin film thickness measurement system for semiconductor industries

Conference Proceedings. 10th Anniversary. IMTC/94. Advanced Technologies in I & M. 1994 IEEE Instrumentation and Measurement Technolgy Conference (Cat. No.94CH3424-9) ◽

10.1109/imtc.1994.352008 ◽

2002 ◽

Author(s):

M. Horie ◽

N. Fujiwara ◽

M. Kokubo ◽

N. Kondo

Keyword(s):

Thin Film ◽

Film Thickness ◽

Measurement System ◽

Thickness Measurement ◽

Thin Film Thickness ◽

Film Thickness Measurement ◽

Thickness Measurement System

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Instrumented Engine Bearings for Lubricant Film Thickness Measurement

MTZ worldwide ◽

10.1007/s38313-021-0732-1 ◽

2021 ◽

Vol 83 (1) ◽

pp. 28-37

Author(s):

Henry Brunskill ◽

Andrew Hunter ◽

Hosung Nam ◽

Junsik Park

Keyword(s):

Film Thickness ◽

Thickness Measurement ◽

Lubricant Film ◽

Lubricant Film Thickness ◽

Film Thickness Measurement

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