In situ film thickness measurement and gaseous species detection in diamond CVD processes using FTIR emission spectroscopy

1994 ◽  
Vol 68-69 ◽  
pp. 394-397 ◽  
Author(s):  
S. Jin ◽  
L. Bourget ◽  
E. Sevillano
Keyword(s):  
Film Thickness ◽  
Emission Spectroscopy ◽  
Thickness Measurement ◽  
Gaseous Species ◽  
Species Detection ◽  
Film Thickness Measurement

In-situ film thickness measurement for CVD by use of spectrometer

2000 ◽  
Author(s):  
Tomomi Ino ◽  
Akira Soga ◽  
Yoshiaki Akama ◽  
Naoto Nishida
Keyword(s):  
Film Thickness ◽  
Thickness Measurement ◽  
Film Thickness Measurement

In situ thin film thickness measurement with acoustic Lamb waves

1995 ◽  
Vol 66 (17) ◽  
pp. 2177-2179 ◽  
Author(s):  
Jun Pei ◽  
F. Levent Degertekin ◽  
Butrus T. Khuri‐Yakub ◽  
Krishna C. Saraswat
Keyword(s):  
Thin Film ◽  
Film Thickness ◽  
Lamb Waves ◽  
Thickness Measurement ◽  
Thin Film Thickness ◽  
Film Thickness Measurement

Nanoscale film thickness measurement based on weak measurement

2020 ◽  
Vol 91 (12) ◽  
pp. 123111
Author(s):  
Zirui Qin ◽  
Qinggang Liu ◽  
Chong Yue ◽  
Yaopu Lang ◽  
Xinglin Zhou
Keyword(s):  
Film Thickness ◽  
Thickness Measurement ◽  
Weak Measurement ◽  
Film Thickness Measurement
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