scholarly journals New CMOS-compatible platforms based on silicon nitride and Hydex for nonlinear optics

2013 ◽  
Vol 7 (8) ◽  
pp. 597-607 ◽  
Author(s):  
David J. Moss ◽  
Roberto Morandotti ◽  
Alexander L. Gaeta ◽  
Michal Lipson
Keyword(s):  
Silicon Nitride ◽  
Nonlinear Optics ◽  
Cmos Compatible

Heterogeneous silicon nitride waveguide integrated with few-layer WS2 for on-chip nonlinear optics

2021 ◽  
Author(s):  
Yuchen Wang ◽  
Vincent Pelgrin ◽  
Samuel Gyger ◽  
Christian Lafforgue ◽  
Val Zwiller ◽  
...  
Keyword(s):  
Silicon Nitride ◽  
Nonlinear Optics ◽  
On Chip

scholarly journals Silicon nitride CMOS-compatible platform for integrated photonics applications at visible wavelengths

2013 ◽  
Vol 21 (12) ◽  
pp. 14036 ◽  
Author(s):  
Sebastian Romero-García ◽  
Florian Merget ◽  
Frank Zhong ◽  
Hod Finkelstein ◽  
Jeremy Witzens
Keyword(s):  
Silicon Nitride ◽  
Integrated Photonics ◽  
Cmos Compatible ◽  
Visible Wavelengths

scholarly journals CMOS-compatible silicon nitride spectrometers for lab-on-a-chip spectral sensing

2016 ◽  
Author(s):  
Eva Ryckeboer ◽  
Xiaomin Nie ◽  
Ananth Z. Subramanian ◽  
Daan Martens ◽  
Peter Bienstman ◽  
...  
Keyword(s):  
Silicon Nitride ◽  
Lab On A Chip ◽  
Cmos Compatible ◽  
Spectral Sensing

scholarly journals Low Loss CMOS-Compatible PECVD Silicon Nitride Waveguides and Grating Couplers for Blue Light Optogenetic Applications

2016 ◽  
Vol 8 (5) ◽  
pp. 1-11 ◽  
Author(s):  
Luis Hoffman ◽  
Ananth Subramanian ◽  
Philippe Helin ◽  
Bert Du Bois ◽  
Roel Baets ◽  
...  
Keyword(s):  
Silicon Nitride ◽  
Blue Light ◽  
Low Loss ◽  
Grating Couplers ◽  
Cmos Compatible

Supercontinuum Generation in Bandgap Engineered Silicon Rich Nitride Waveguides – a New Back-End CMOS Compatible Nonlinear Optics Platform

2015 ◽  
Author(s):  
Ting Wang ◽  
Doris K. T. Ng ◽  
Siu-Kit Ng ◽  
Yeow-Teck Toh ◽  
A. K. L. Chee ◽  
...  
Keyword(s):  
Nonlinear Optics ◽  
Supercontinuum Generation ◽  
Cmos Compatible

A 300mm CMOS-compatible PECVD silicon nitride platform for integrated photonics with low loss and low process induced phase variation

2019 ◽  
Author(s):  
Sandeep S. Saseendran ◽  
Tangla D. Kongnyuy ◽  
Bruno Figeys ◽  
Federico Buja ◽  
Benedetto Troia ◽  
...  
Keyword(s):  
Silicon Nitride ◽  
Phase Variation ◽  
Integrated Photonics ◽  
Low Loss ◽  
Cmos Compatible

Engineering in- and out-of-plane stress in PECVD silicon nitride for CMOS-compatible surface micromachining

2001 ◽  
Author(s):  
Rhodri R. Davies ◽  
Mark E. McNie ◽  
Kevin M. Brunson ◽  
David Combes
Keyword(s):  
Silicon Nitride ◽  
Plane Stress ◽  
Surface Micromachining ◽  
Out Of Plane ◽  
Cmos Compatible

scholarly journals Low Loss Silicon-Rich Silicon Nitride for Nonlinear Optics

2018 ◽  
Author(s):  
Zhichao Ye ◽  
Attila Fülöp ◽  
Óskar Bjarki Helgason ◽  
Peter A. Andrekson ◽  
Victor Torres-Company
Keyword(s):  
Silicon Nitride ◽  
Nonlinear Optics ◽  
Low Loss

CMOS-compatible low stress silicon nitride films for photonic integration

2020 ◽  
Author(s):  
Donghao Li ◽  
Bin Li ◽  
Bo Tang ◽  
Wenjuan Xiong ◽  
Peng Zhang ◽  
...  
Keyword(s):  
Silicon Nitride ◽  
Photonic Integration ◽  
Silicon Nitride Films ◽  
Cmos Compatible
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