A high efficiency silicon nitride waveguide grating coupler with a multilayer bottom reflector

Abstract We propose a high efficiency apodized grating coupler with a bottom reflector for silicon nitride photonic integrated circuits. The reflector consists of a stack of alternate silicon nitride and silicon dioxide quarter-wave films. The design, fabrication and optical characterization of the couplers has been presented. The measured fiber to detector insertion loss was −3.5 dB which corresponds to a peak coupling efficiency of −1.75 dB. A 3 dB wavelength bandwidth of 76.34 nm was demonstrated for the grating coupler with a 20-layer reflector. The fabrication process is CMOS-compatible and requires only a single etching step.

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Thermal and Optical Characterization of Photonic Integrated Circuits by Thermoreflectance Microscopy

IEEE Journal of Quantum Electronics ◽

10.1109/jqe.2009.2022648 ◽

2010 ◽

Vol 46 (1) ◽

pp. 3-10 ◽

Cited By ~ 3

Author(s):

Joseph A. Summers ◽

Maryam Farzaneh ◽

Rajeev J. Ram ◽

Janice A. Hudgings

Keyword(s):

Integrated Circuits ◽

Photonic Integrated Circuits ◽

Optical Characterization ◽

Thermoreflectance Microscopy

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Monolithic integration of laser onto multilayer silicon nitride photonic integrated circuits with high efficiency at telecom wavelength

Optics Express ◽

10.1364/oe.434913 ◽

2021 ◽

Author(s):

Yisu Yang ◽

Hao Zhao ◽

Xiaomin Ren ◽

Yongqing Huang

Keyword(s):

Silicon Nitride ◽

Integrated Circuits ◽

High Efficiency ◽

Photonic Integrated Circuits ◽

Monolithic Integration ◽

Telecom Wavelength

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High-efficiency broadband light coupling between optical fibers and photonic integrated circuits

Nanophotonics ◽

10.1515/nanoph-2018-0075 ◽

2018 ◽

Vol 7 (12) ◽

pp. 1845-1864 ◽

Cited By ~ 26

Author(s):

Gyeongho Son ◽

Seungjun Han ◽

Jongwoo Park ◽

Kyungmok Kwon ◽

Kyoungsik Yu

Keyword(s):

Integrated Circuits ◽

Optical Fibers ◽

Optical Switching ◽

High Efficiency ◽

Photonic Integrated Circuits ◽

Coupling Efficiency ◽

Optical Signal ◽

Coupling Methods ◽

Light Coupling ◽

Waveguide Coupling

AbstractEfficient light energy transfer between optical waveguides has been a critical issue in various areas of photonics and optoelectronics. Especially, the light coupling between optical fibers and integrated waveguide structures provides essential input-output interfaces for photonic integrated circuits (PICs) and plays a crucial role in reliable optical signal transport for a number of applications, such as optical interconnects, optical switching, and integrated quantum optics. Significant efforts have been made to improve light coupling properties, including coupling efficiency, bandwidth, polarization dependence, alignment tolerance, as well as packing density. In this review article, we survey three major light coupling methods between optical fibers and integrated waveguides: end-fire coupling, diffraction grating-based coupling, and adiabatic coupling. Although these waveguide coupling methods are different in terms of their operating principles and physical implementations, they have gradually adopted various nanophotonic structures and techniques to improve the light coupling properties as our understanding to the behavior of light and nano-fabrication technology advances. We compare the pros and cons of each light coupling method and provide an overview of the recent developments in waveguide coupling between optical fibers and integrated photonic circuits.

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