Influence of discharge parameters on the resolution of depth profiling by pulsed glow discharge atomic emission spectrometry

2000 ◽  
Vol 15 (1) ◽  
pp. 73-78 ◽  
Author(s):  
Chenglong Yang ◽  
Kris Ingeneri ◽  
Matt Mohill ◽  
W. W. Harrison
Keyword(s):  
Glow Discharge ◽  
Depth Profiling ◽  
Atomic Emission ◽  
Atomic Emission Spectrometry ◽  
Emission Spectrometry ◽  
Pulsed Glow Discharge ◽  
Discharge Parameters

Depth Profiling of Thin Films with Pulsed Glow Discharge Atomic Emission Spectrometry

1999 ◽  
Vol 71 (23) ◽  
pp. 5328-5334 ◽  
Author(s):  
Chenglong Yang ◽  
Kristofor Ingeneri ◽  
Matt Mohill ◽  
W. W. Harrison
Keyword(s):  
Thin Films ◽  
Glow Discharge ◽  
Depth Profiling ◽  
Atomic Emission ◽  
Atomic Emission Spectrometry ◽  
Emission Spectrometry ◽  
Pulsed Glow Discharge
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