Preferential 〈220〉 crystalline growth in nanocrystalline silicon films from 27.12 MHz SiH4 plasma for applications in solar cells
Keyword(s):
Si-ncs are generally of 〈111〉 crystal orientation from random nucleation within poly-H network at grain-boundary, while Si ultra-ncs preferably harvest 〈220〉 alignment due to thermodynamically preferred grain growth by mono-H bonding at the boundary.