Thin film depth profiling by ion beam analysis
Keyword(s):
Ion Beam
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The analysis of thin films is of central importance for functional materials, including the very large and active field of nanomaterials.
2000 ◽
Vol 161-163
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pp. 510-514
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1999 ◽
Vol 159
(1-2)
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pp. 67-74
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2000 ◽
Vol 161-163
◽
pp. 595-599
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1989 ◽
Vol 40-41
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pp. 806-808
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