Patterning at the 10 nanometer length scale using a strongly segregating block copolymer thin film and vapor phase infiltration of inorganic precursors
Keyword(s):
2014 ◽
Vol 6
(12)
◽
pp. 9442-9448
◽
2015 ◽
Vol 9
(6)
◽
pp. 525-535
◽
2021 ◽
Vol 170
◽
pp. 107159
Keyword(s):
2015 ◽
Vol 2
(2)
◽
pp. 1500209
◽
Keyword(s):
Keyword(s):
Keyword(s):
Keyword(s):