Combining single source chemical vapour deposition precursors to explore the phase space of titanium oxynitride thin films
Keyword(s):
Combining single-source precursors in aerosol assisted CVD allows control of the composition of mixed anion titanium oxynitride thin films.
2006 ◽
Vol 16
(10)
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pp. 966-969
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Keyword(s):
2016 ◽
Vol 4
(45)
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pp. 10731-10739
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2016 ◽
Vol 4
(12)
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pp. 2312-2318
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Keyword(s):
2015 ◽
Vol 415
◽
pp. 93-99
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Keyword(s):