Homoleptic zirconium amidates: single source precursors for the aerosol-assisted chemical vapour deposition of ZrO2
2016 ◽
Vol 4
(45)
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pp. 10731-10739
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Keyword(s):
We report the development of a true single source precursor for the growth of zirconia thin films by aerosol-assisted chemical vapour deposition using an original family of zirconium(iv) amidate derivatives.
2006 ◽
Vol 16
(10)
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pp. 966-969
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Keyword(s):
Keyword(s):
Keyword(s):
2016 ◽
Vol 4
(12)
◽
pp. 2312-2318
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