In situ characterization of atomic layer deposition of SrTiO3

2001 ◽  
Vol 11 (PR3) ◽  
pp. Pr3-923-Pr3-930 ◽  
Author(s):  
A. Rahtu ◽  
T. Hänninen ◽  
M. Ritala
Keyword(s):  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
In Situ Characterization ◽  
Layer Deposition

Atomic Layer Deposition and in Situ Characterization of Ultraclean Lithium Oxide and Lithium Hydroxide

2014 ◽  
Vol 118 (48) ◽  
pp. 27749-27753 ◽  
Author(s):  
Alexander C. Kozen ◽  
Alexander J. Pearse ◽  
Chuan-Fu Lin ◽  
Marshall A. Schroeder ◽  
Malachi Noked ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Lithium Hydroxide ◽  
Lithium Oxide ◽  
In Situ Characterization ◽  
Layer Deposition

In-situ characterization of Ga2O passivation of In0.53Ga0.47As prior to high-k dielectric atomic layer deposition

2011 ◽  
Vol 99 (4) ◽  
pp. 042904 ◽  
Author(s):  
M. Milojevic ◽  
R. Contreras-Guerrero ◽  
E. O’Connor ◽  
B. Brennan ◽  
P. K. Hurley ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
In Situ Characterization ◽  
Layer Deposition ◽  
High K ◽  
High K Dielectric

In situ characterization of atomic layer deposition processes by a mass spectrometer

1999 ◽  
Vol 09 (PR8) ◽  
pp. Pr8-1021-Pr8-1028 ◽  
Author(s):  
M. Ritala ◽  
M. Juppo ◽  
K. Kukli ◽  
A. Rahtu ◽  
M. Leskelä
Keyword(s):  
Atomic Layer Deposition ◽  
Mass Spectrometer ◽  
Atomic Layer ◽  
In Situ Characterization ◽  
Layer Deposition ◽  
Deposition Processes

In Situ Characterization of Gas-Phase Species Present During Hafnium Oxide Atomic Layer Deposition

2019 ◽  
Vol 2 (7) ◽  
pp. 133-143 ◽  
Author(s):  
James E. Maslar ◽  
Wilbur Hurst ◽  
Donald Burgess ◽  
William Kimes ◽  
Nhan Nguyen
Keyword(s):  
Atomic Layer Deposition ◽  
Gas Phase ◽  
Hafnium Oxide ◽  
Atomic Layer ◽  
In Situ Characterization ◽  
Layer Deposition

Characterization of HfO N thin film formation by in-situ plasma enhanced atomic layer deposition using NH3 and N2 plasmas

2015 ◽  
Vol 349 ◽  
pp. 757-762 ◽  
Author(s):  
Young Bok Lee ◽  
Il-Kwon Oh ◽  
Edward Namkyu Cho ◽  
Pyung Moon ◽  
Hyungjun Kim ◽  
...  
Keyword(s):  
Thin Film ◽  
Atomic Layer Deposition ◽  
Film Formation ◽  
Atomic Layer ◽  
Layer Deposition ◽  
Thin Film Formation
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