Electron scattering by gas in the Environmental Scanning Electron Microscope (ESEM): Effects on the image quality and on the X-ray microanalysis

2004 ◽  
Vol 118 ◽  
pp. 237-243 ◽  
Author(s):  
L. Khouchaf ◽  
J. Verstraete
Keyword(s):  
Electron Microscope ◽  
Image Quality ◽  
Scanning Electron Microscope ◽  
Electron Scattering ◽  
Environmental Scanning Electron Microscope ◽  
Environmental Scanning ◽  
X Ray ◽  
Scanning Electron

scholarly journals Performance of X-ray Microanalysis in the Variable Pressure or Environmental Scanning Electron Microscope

2006 ◽  
Vol 12 (S02) ◽  
pp. 1492-1493 ◽  
Author(s):  
J-F Le Berre ◽  
K Robertson ◽  
R Gauvin ◽  
GP Demopoulos
Keyword(s):  
Electron Microscope ◽  
Scanning Electron Microscope ◽  
Environmental Scanning Electron Microscope ◽  
Variable Pressure ◽  
Environmental Scanning ◽  
X Ray ◽  
Scanning Electron

Extended abstract of a paper presented at Microscopy and Microanalysis 2006 in Chicago, Illinois, USA, July 30 – August 3, 2006

Accuracy and Precision f Quantitative X-Ray Microanalysis in the Environmental Scanning Electron Microscope (ESEM)

2001 ◽  
Vol 7 (S2) ◽  
pp. 676-677
Author(s):  
Robert A. Carlton ◽  
Charles E. Lyman ◽  
James E. Roberts
Keyword(s):  
Electron Microscope ◽  
Scanning Electron Microscope ◽  
Environmental Scanning Electron Microscope ◽  
Environmental Scanning ◽  
X Ray ◽  
Charge Neutralization ◽  
Carbon Tape ◽  
Glass Spheres ◽  
Accuracy And Precision ◽  
Scanning Electron

This paper presents the results of studies concerning the accuracy and precision of x-ray microanalysis (EDS) in the environmental scanning electron microscope (ESEM). The ESEM is distinguished by its use-of gas in the microscope specimen chamber for imaging and for charge neutralization. Previous work on EDS-ESEM has concentrated either on qualitative x-ray microanalysis or on correction methods to the enlarged x-ray spatial resolution due to the electron skirt. Recent work shows that quantitative analysis is possible once charge neutralization can be accomplished in practice.Accuracy and precision were evaluated in the work presented here using NIST SRM 482 (goldcopper alloys) and NIST SRM K411 (glass beads). The gold-copper alloy wires were prepared by mounting them in epoxy mounts and polishing to a metallurgical finish. The glass spheres were prepared by sprinkling a small amount of the sample onto double-sided carbon tape mounted onto an aluminum SEM stub.

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