Fabrication of ultrafine gratings on GaAs by electron beam lithography and two‐step wet chemical etching

1990 ◽  
Vol 57 (12) ◽  
pp. 1212-1214 ◽  
Author(s):  
T. Katoh ◽  
Y. Nagamune ◽  
G. P. Li ◽  
S. Fukatsu ◽  
Y. Shiraki ◽  
...  
Keyword(s):  
Electron Beam ◽  
Electron Beam Lithography ◽  
Chemical Etching ◽  
Wet Chemical ◽  
Wet Chemical Etching

Size Fluctuation of 50 nm Periodic GaInAsP/InP Wire Structure by Electron Beam Lithography and Wet Chemical Etching

1998 ◽  
Vol 37 (Part 1, No. 11) ◽  
pp. 5961-5962 ◽  
Author(s):  
Takashi Kojima ◽  
Xue-Ying Jia ◽  
Yoshinori Hayafune ◽  
Shigeo Tamura ◽  
Masahiro Watanabe ◽  
...  
Keyword(s):  
Electron Beam ◽  
Electron Beam Lithography ◽  
Chemical Etching ◽  
Wet Chemical ◽  
Wet Chemical Etching

Very fine corrugations formed on InP by wet chemical etching and electron beam lithography

1989 ◽  
Vol 25 (3) ◽  
pp. 238 ◽  
Author(s):  
E. Inamura ◽  
S. Tamura ◽  
Y. Miyamoto ◽  
K. Furuya ◽  
Y. Suematsu
Keyword(s):  
Electron Beam ◽  
Electron Beam Lithography ◽  
Chemical Etching ◽  
Wet Chemical ◽  
Wet Chemical Etching

scholarly journals Patterned Quantum Dot Molecule Laser Fabricated by Electron Beam Lithography and Wet Chemical Etching

2010 ◽  
Vol 46 (12) ◽  
pp. 1827-1833 ◽  
Author(s):  
V. B. Verma ◽  
U. Reddy ◽  
N. L. Dias ◽  
K. P. Bassett ◽  
X. Li ◽  
...  
Keyword(s):  
Electron Beam ◽  
Quantum Dot ◽  
Electron Beam Lithography ◽  
Chemical Etching ◽  
Wet Chemical ◽  
Wet Chemical Etching

Indium Arsenide Quantum Wires Fabricated by Electron Beam Lithography and Wet-Chemical Etching

1992 ◽  
Vol 31 (Part 1, No. 12B) ◽  
pp. 4515-4519 ◽  
Author(s):  
Kanji Yoh ◽  
Kazumasa Kiyomi ◽  
Akira Nishida ◽  
Masataka Inoue
Keyword(s):  
Electron Beam ◽  
Indium Arsenide ◽  
Electron Beam Lithography ◽  
Chemical Etching ◽  
Quantum Wires ◽  
Wet Chemical ◽  
Wet Chemical Etching
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