Internal stress reduction by nitrogen incorporation in hard amorphous carbon thin films
Keyword(s):
2000 ◽
Vol 9
(3-6)
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pp. 1205-1208
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1999 ◽
Vol 148
(1-4)
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pp. 216-220
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Keyword(s):
2013 ◽
Vol 14
(4)
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pp. 165-171
Keyword(s):
1993 ◽
Vol 51
◽
pp. 1100-1101
Keyword(s):
2020 ◽
Vol 249
◽
pp. 119363
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Keyword(s):
2014 ◽
Vol 258
◽
pp. 219-224
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