Internal stress reduction in diamond like carbon thin films by ion irradiation
1999 ◽
Vol 148
(1-4)
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pp. 216-220
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Keyword(s):
Keyword(s):
1995 ◽
Vol 258
(1-2)
◽
pp. 123-127
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2016 ◽
Vol 70
◽
pp. 151-158
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Keyword(s):
Keyword(s):
2013 ◽
Vol 133
(5)
◽
pp. 293-299
2012 ◽
Vol 25
◽
pp. 8-12
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Keyword(s):
2009 ◽
Vol 11
(10)
◽
pp. 1797-1800
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