Control of plasma parameters in sheet‐shaped electron cyclotron resonance heating plasma supplemented with radio frequency discharge
1996 ◽
Vol 67
(4)
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pp. 1502-1507
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1998 ◽
Vol 7
(4)
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pp. 607-616
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1990 ◽
Vol 8
(3)
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pp. 1820-1824
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2012 ◽
Vol 83
(2)
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pp. 02A317
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Keyword(s):
2019 ◽
Vol 29
(9)
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2019 ◽
Vol 61
(7)
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pp. 075006
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