Evidence for negatively charged vacancy defects in 6H-SiC after low-energy proton implantation
2001 ◽
Vol 308-310
◽
pp. 668-670
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Keyword(s):
2011 ◽
Vol 166
(4)
◽
pp. 258-264
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Keyword(s):
2010 ◽
Vol 268
(15)
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pp. 2467-2469
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Keyword(s):